GENTEC

Features

* 316L or 316L VAR stainless steel body
* Metal-to-metal diaphragm-to-body seal
* Easy installation with front panel and rear bracket mounting
* Gauge ports with standard 1/4" male face seal fittings
* Fully electropolished internal surfaces
* Cleaned, assembled, and packaged in a cleanroom environment for high-purity semiconductor applications
* High cycle life
* 100% helium leak tested

Features

• 316L or 316L VAR stainless steel body
• Available with both manual and pneumatic actuation
• Optional LOTO handle for Lockout/Tagout safety procedures
• Compatible with face seal fittings (FSR) or butt weld connections
• Internal spring-less design with metal-to-metal sealing minimizes particle generation and ensures purity integrity in flow passages
• Cleaned and degreased for oxygen service per CGA G-4.1 and ASTM G93 Class C standards
• High-cycle life
• 100% helium leak tested

Materials

• Body: 316L, 316L VAR
• Seat: PCTFE, Vespel®
• Diaphragm: Co-Ni Super Alloy

Specification

• The material meets the ultra-high purity grade requirements of SEMI F20 standard.
• Wetted surface meets the ultra-high purity grade requirements of SEMI F19 standard, with a surface roughness of Ra 5 µin.
• All materials and production processes are traceable.
• The final cleaning and packaging are completed in a Class 100 cleanroom, in compliance with S1 ultra-high purity process specifications.
• 1.125” C-Seal, complies with SEMI F102 interfaces.

Features

• Imported bourdon tube
• Assembly, calibration and packaging are performed in a Class 100 (ISO 5) cleanroom
• Electro-polished components and connection
• Product 100% helium tested
• Helium leakage rate: < 1×10⁻⁹ mbar·L/s
• Wetted surface: Ra 10 µin
• Accuracy: 3-2-3
• Meet SEMI standards
• Complies with ASME B40.100

Operating Conditions

• Pressure range: vacuum to 4000 psi
• Temperature range: -40 ~ 150°F (–40 ~ 65°C)
• Medium: high purity, corrosive gases and liquids

Materials

• Bourdon Tube: 316L
• Socket: 316L

GENTEC® FSR fittings are available in 316, 316L, or 316 VAR and supplied in BA or EP grade.
Fittings are cleaned, bagged individually in nylon bags, and heat-sealed. The inner bag is then placed in a polyethylene outer bag and heat-sealed in a Class 100 (ISO 5) cleanroom to meet the stringent demands of the semiconductor industry.

GENTEC® Weld Fittings provide high-integrity connections for ultra-high purity systems. These fittings are designed with compact configurations, making them ideal for use with orbital welding equipment.
Constructed from stainless steel, GENTEC® weld fittings undergo specialized machining and surface enhancements to prevent outgassing and resist corrosion.

Features

• Suitable for most specialty gases including variants for oxygen and highly corrosive gases such as chlorine and hydrogen chloride
• Manual and pneumatic versions are available based on a common body design
• Final assembly and testing are carried out under Class 100 (ISO 5) cleanroom conditions
• 100% high-pressure helium leak test
• Tied-diaphragm design with replaceable valve seat
• Various inlet and outlet gas connection standards are available (CGA, JIS, ISO etc.)
• For transportation, the actuator can be locked to prevent shock-induced leakage
• The outlet port is sealed and protected by a cap retained by a chain
• Internally springless design
• The valve mechanism incorporates secondary sealing for enhanced safety

Materials

• Body: 316L, 316L VAR
• Seat: Vespel®, PCTFE
• Diaphragm: Co-Ni Super Alloy