LOT Vacuum Co., Ltd.

Osan-si,  Gyeonggi-do 
Korea (South)
http://www.lotvacuum.com
  • Booth: R7324

Total Vacuum Solution | LOT Vacuum, Korea’s Global Player

Overview

With the best vacuum technology and solutions, LOT Vacuum is taking a leap forward to become a global player.
LOT Vacuum is the only company within Korea competing on a global scale. 

Until the early 2000’s, Korea was heavily dependent on foreign dry vacuum technology. However, with the foundation of LOT Vacuum in 2002, LOT Vacuum was responsible for the global market’s paradigm shift with independent R&D and a customer-centric mindset/strategy.

In the beginning, LOT Vacuum helped develop the domestic market by establishing technological independence and localizing vacuum products and their supply chain. As a result, we are now the No.1 dry pump provider in Korea’s semiconductor market.

We are continuously developing new solutions and next-generation models all while working closely with our customers and partners around the world.

Moving forward, we will take a new leap as the true global ‘Total Vacuum Solution Provider’ by expanding our business areas and strengthening our technology capabilities. Together, we will continue to grow our company values and spread happiness among all of us/ be a driving force for the development of the industry.

  Products

  • HD Series, XD Series
    Both the HD and XD series are low-power consumption pumps from LOT Vacuum. They are widely used in the semiconductor industry and feature a hybrid screw rotor design....

    • HD Series
    Hybrid Screw Rotor Design
    → Equipped with a hybrid screw that combines lobe and screw types, providing excellent powder handling capability. The short gas path further enhances powder processing performance.

    Low Power Consumption
    → With the hybrid screw compression structure, the HD series consumes less power compared to the DD series.

    XD Series
    Hybrid Screw Rotor Design
    → Designed for light process applications.
    → Compact pump design ensures low power consumption.
    → Features LOT’s coating for enhanced corrosion resistance, ideal for semiconductor etch processes that involve corrosive gases.

    Small Installation Footprint
    → Approximately 35% smaller footprint compared to competitors' models with similar specifications.

Categories

401 Sub-systems
  • Pumps, Vacuum
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