APOLLOTECH

Gyeonggi-do,  Korea (South)
http://www.apollotech.co.kr/ko/index
  • Booth: Q5139

SEMICONDUCTOR WAFER & ESC EXPERT, APOLLOTECH

Overview

Welcome to ApolloTech Co., Ltd.
Since our founding in 1998, we have specialized in importing and exporting key raw materials for the semiconductor and advanced IT industries. We provide various types of silicon wafers—including test, dummy, and oxide wafers—as well as silicon wafer reclaim services.
We also develop, design, and mass-produce Electrostatic Chucks (ESC) and ESC controllers, offering full support from R&D to customer site service for semiconductor and display applications. Furthermore, we hold advanced plating technology and production lines for engineering plastics used in mobile, communications, and automotive sectors.
ApolloTech is committed to becoming a leading global materials company through continuous innovation, strong customer collaboration, and dedication to quality. We will keep striving to deliver the best solutions and customer satisfaction.
Thank you.


  Products

  • WAFER
    Apollotech has been supplying silicon wafers and other
    silicon materials as well as parts used in semiconductor production and solar battery
    industries by processing and exporting or importing....

  • 1. Reclaim Wafer
    Reclaim wafers are previously used wafers that are restored through grinding, polishing, and cleaning for reuse in semiconductor fabs. Both non-pattern and pattern wafer recovery services are available.
    2. Dummy Wafer
    Dummy wafers are primarily used for test runs to check equipment conditions before actual production. They help protect production wafers and fill empty slots during processing. Their dimensions are similar to test wafers.
    3. Spacer (Mirror) Wafer
    Spacer or mirror wafers are attached to the backside of thinned wafers after backside grinding in the packaging process. They are mainly used to protect and support wafers during transportation.
    4. Oxide Wafer
    Oxide wafers are produced through thermal oxidation, forming a uniform silicon dioxide layer on the wafer surface. Compared to CVD methods, thermal oxidation offers better uniformity and dielectric strength, making these wafers ideal for high-quality oxide film applications.
  • WOW FLEX
    WOWFLEX is cleanroom moving system designed to minimize particle emissions in semiconductor and display process environments....

  • WOWFLEX is a cleanroom cable moving system designed to minimize particle emissions in controlled environments for semiconductor and display manufacturing. We were the first in Korea to patent a modular block assembly and have delivered clean cable solutions based on this design.
    With ongoing R&D and testing, we ensured reliable operation for up to 4,800mm ST. All WOWFLEX parts are localized, and cables are independently designed and produced for fully customized solutions.
    1) Perfect design for non-particle
    Eptfe material blocks fine particles and contaminants.
    Optimized for cleanliness, meeting ISO 14644-1 standards.
    2) Outstanding durability and flexibility
    Over 10 million cycles; abrasion and shock resistant.
    Flexible design prevents damage during movement.
    3) Efficient maintenance and cost savings
    Reduces particle-related defects and maintenance costs.
    Lightweight design allows easier installation than cableveyor.
    4) Customized design for Cleanroom
    Various options based on customer needs.
    Ideal for semiconductors, medical, solar, and display industries.
  • E.S.C. (Electro Static Chuck)
    E.S.C. (Electro Static Chuck) is a device that fixes glass by using static energy.
    It is a core part that evenly fixes the wafer surface by using static energy within
    the vacuum chamber of semi-conductors and LCD & OLED production process equipment....

  • Product of P.I (Polymide) ESC (Bipolar type)

    Size : 380 x 480mm

    Size: 344 x 610mm

    Size : 366 x 626mm

    Size : 326 x 565mm

    Size : 259 x 385mm

    SizeØ300mm