scia Systems - Equipped for Precision
Overview
scia Systems develops and manufactures equipment with complex plasma and ion beam technologies for ultra-precise surface processing, especially for the MEMS, microelectronics and precision optics industries.
Expertise in microelectronic manufacturing: Coating | Etching | Cleaning
scia Systems provides technologies and process equipment for various microelectronic applications:
- Smart sensor technology
e.g., biotechnology sensors, lab-on-chip systems, GMR, TMR, IR sensors
- High-frequency electronics
e.g., BAW, SAW
- Cost-efficient power electronics
Advanced Silicon & beyond
- System Integration by Advanced Electronics Packaging
e.g., multichip packages, SiPs, 3D packaging
Due to their flexible and modular design, the process equipment can be configured according to customer specific requirements, for research applications as well as high volume production in either a "cluster" or "inline" configuration. Our wide range of processing technologies includes etching processes, like Ion Beam Trimming, Ion Beam Milling and Reactive Ion Etching as well as coating processes such as Ion Beam Sputtering, PECVD and Magnetron Sputtering.