R Axis for Diffusion Furnace, Rotary Union for Sputter: Seal
Overview
Sealink Vacuum Rotary Sealing Units are Not magnetic ferrofluid Seal.
R-axis for Furnace equipment (rotation shaft sealing device): New technology with Sealink S-Seal can replace magnetic fluid seals. and also New Technolog of Rotary Union for Sputter.
We are looking forward to meeting you at ‘Semicon Taiwan 2025’. After your visit, we have a certainty that we can give you the optimal sealing solution for your projects based on the experiences of supplying Foundary Company. We are specialized in manufacturing and designing Rotary/Linear feedthroughs and Rotary unions.
Sealink’s feedthroughs are applied with the unique sealing technology. There are some distinctive features.
- Working at high pressure and high vacuum condition.
- Various types of media can be sealed: gas, liquid, etc.
- Our sealing technology is not based on ferrofluids or magnetics.
Competitive advantages
| Type | Condition | Media | Price |
| Magnetic Seals | Vacuum only | Gas | High |
| Sealink Seals | Vacuum & Pressure | Gas, Liquid, etc | Reasonable |
Applications : Semiconductor Industries
- CVD, MOCVD, LPCVD, PECVD, PCD, ALD, CMP, OLED, LCD, FPD, Wafer handling, Vacuum deposition,
Ion Implanter Etcher, Asher, Edge Grinder, Scrubber, RTP, Sputter, Lamp, Autoclave, Wafer robot etc.