Tomocube, Inc

Yuseong-gu,  30 
Korea (South)
https://tomocube.com/precision/
  • Booth: T9237

Holotomography, Deep Insights from Surface to Substrate.

Overview

🔷 Tomocube Inc.
Pioneering Industrial Holotomography
Deep Insights from Surface to Substrate

Tomocube Inc. is the global leader in Industrial Holotomography, an advanced 3D optical imaging technology that enables quantitative, non-destructive analysis of internal structures across a wide range of transparent and semi-transparent materials.

Our proprietary holotomography platform provides high-resolution, refractive index-based 3D imaging without the need for physical cross-sectioning or destructive sample prep.
The result: Real-time, volumetric insight into structures below the surface, enabling process engineers and quality teams to detect defects early, optimize parameters, and improve yield.

✅ Key Applications across Industries

🔹 Glass Substrate Processing
• Detect cracks, residues, and voids in TGV/Blind Via
• Visualize taper angle, hole completeness, and inner-wall roughness
• Monitor laser modification and etching behavior quantitatively

🔹 Semiconductor Packaging
• Measure Cu pad recess and shape deformation in hybrid bonding
• Analyze line width and thickness in fine RDL patterns
• Quantify surface roughness of dielectric layers and trenches

🔹 Photonic Integrated Circuits (PICs)
• 3D characterization of optical waveguides
• Evaluate RI uniformity and structural alignment in transparent layers

🔹 Display Industry (AR/XR, MicroLED, MLA)
• Inspect micro display pixel structures
• Visualize and analyze Micro Lens Arrays (MLA) alignment and shape
• Non-destructive inspection of embedded components under transparent layers

Tomocube’s holotomography modules are being adopted by metrology tool makers, display and semiconductor manufacturers, and research centers around the world.
We continue to expand industrial applications through partnerships with process equipment manufacturers and system integrators.

✨ Experience the unmatched depth and precision of Holotomography – now made for industrial use.

✉️ For more info or partnerships, visit us at Booth #T9237, SEMICON Taiwan 2026

  Products

  • HT-R1 Module(HOLOTOMOGRAPHY REFLECTION MODULE)
    The Tomocube HT-R1 offers 130 nm resolution and 0.1 nm surface sensitivity in reflection mode, enabling 3D imaging of opaque and transparent samples. It supports Cu recess, roughness, CD, step height, and micro display structure measurements....

    • 🔍 HT-R1 Module(HT-R1M) Overview

    The HT-R1M is a high-resolution, reflection-mode holotomography engine optimized for OEM integration into advanced inspection and metrology tools.

    • 🎯 130 nm Optical Lateral Resolution

    • 📏 0.1 nm Surface Sensitivity

    • 🧩 Compact and Modular Design for seamless equipment integration

    • 📡 Supports both opaque and transparent sample imaging

    🚀 Key Applications

    • 🔧 Cu Recess & Surface Roughness Measurement in hybrid bonding

    • 🎞️ Critical Dimension (CD) & Step Height Analysis of transparent films

    • 📺 Micro Display Structure Inspection

    🛠️ Designed for Equipment Manufacturers

    With robust software APIs and flexible control options, the HT-R1 Module empowers system builders to embed non-destructive 3D metrology into next-generation semiconductor, display, and packaging equipment.

    Achieve high-throughput, high-precision, and high-value inspection—all in one module.

  • HT-T1 Module(HOLOTOMOGRAPHY TRANSMISSION MODULE)
    The Tomocube HT-T1M offers high-resolution 3D imaging of refractive index variations in transmission mode, enabling precise analysis of TGV roughness, laser-induced changes, micro-cracks, and photonic waveguides—designed for seamless OEM integration....

    • 🔬 HT-T1 Module(HT-T1M) Overview

    The HT-T1M is a high-resolution, transmission-mode holotomography engine optimized for OEM integration into advanced inspection and metrology tools.

    • 🎯 161 nm Optical Lateral Resolution
    • 📐 Quantitative 3D Refractive Index Imaging
    • 🧩 Compact and Modular Design for seamless equipment integration
    • 🔍 Optimized for transparent sample internal structure visualization

    🚀 Key Applications

    • 💥 Laser-induced modification analysis
    • 🔍 Micro-crack detection and morphology mapping
    • 🧱 TGV structure and inner wall roughness inspection
    • 📡 Photonic waveguide geometry and uniformity evaluation

    🛠️ Designed for Equipment Manufacturers

    With robust software APIs and flexible control options, the HT-T1M Module empowers system builders to embed non-destructive 3D metrology into next-generation semiconductor, display, and photonics equipment. Achieve high-throughput, high-precision, and high-value inspection—all in one module.

  • HT-T1 Desktop(HOLOTOMOGRAPHY TRANSMISSION DESKTOP)
    The Tomocube HT-T1D offers high-resolution 3D imaging of refractive index variations in transmission mode, enabling precise analysis of TGV roughness, laser-induced changes, micro-cracks, and photonic waveguides—ideal for R&D centers and research labs....

    • 🔬 HT-T1 Desktop(HT-T1D) Overview

    The HT-T1D is a high-resolution, transmission-mode holotomography desktop system purpose-built for researchers and scientists who demand quantitative 3D insight into transparent sample structures—straight out of the box.

    • 🎯 161 nm Optical Lateral Resolution
    • 📐 Quantitative 3D Refractive Index Imaging
    • 🖥️ All-in-One Desktop System with integrated hardware and software
    • 📏 Supports coupon samples or substrates up to 200 × 200 mm

    🚀 Key Applications

    • 💥 Laser-induced modification analysis
    • 🔍 Micro-crack detection and morphology mapping
    • 🧱 TGV structure and inner wall roughness inspection
    • 📡 Photonic waveguide geometry and uniformity evaluation

    🧪 Built for R&D Excellence

    The HT-T1D is designed for R&D centers and research laboratories that require immediate, high-precision 3D metrology without integration complexity. Combining imaging hardware, a motorized stage, and intuitive measurement software in a single platform, it accelerates discovery from first measurement to final report. Includes built-in tools for 3D visualization, quantitative analysis, and reporting.

Categories

203 Equipment, Inspection & Measurement
  • Defect; Particle; Bump; Contamination Detection, Review or Inspection
  • Instruments; Bench Top Test
  • Line Width; Critical Dimension (CD) Measurement
  • Microscopes: Confocal Scanning Microscope; 3-D Video Microscopes
  • Microscopes: Optical Microscopes
  • Overlay Measurement
  • Package Inspection; Lead Scanners
  • Stress; Refractive Index; Reflectivity & Conductivity Measurement
  • Wafer; Substrate Metrology; Topology; Nanotopography; Flatness Measurement; Crystalline Orientation
    • 206 PV Equipment
  • Inspection and Metrology
    • 208 Equipment, Test
  • Failure Analysis Systems
  • FPD Test; Measurement; Repair Equipment
  • Optical Test Systems

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