Trelleborg Sealing Solutions Taiwan Co. Ltd

O-Rings are the most widely used seal because of their flexibility, ease of use and inexpensive production methods. Suitable for a wide variety of static applications, they are either specified as a single sealing element or as energizing elements for two-component seals and wipers.
 
Our unique and focused range of leading-edge materials delivers exceptional sealing integrity in critical semiconductor processes.
 
Material options for semiconductor sealing include Isolast® PureFab® Perfluoroelastomer (FFKM), Resiflour® PureFab® range of premium Fluoroelastomers for high purity and low trace metal content as well as other Fluoroelastomer (FKM) grades, where process chemicals are less aggressive.
 
Our O-Rings are both cost-effective and perform highly in almost every environment. No matter if you need metric or inch, standard or custom-made O-Rings – any size of O-Ring seals is available – including giant O-Rings using our proprietary FlexiMold® process.

Contact us

+886-423828886

We can effectively bond our elastomer materials, including Isolast® PureFab® Perfluoroelastomers, to a wide variety of surfaces including, stainless steel and mild steel, aluminum and various plastic substrates. This gives the major advantage of maximizing seal integrity, providing ease of assembly, reduced inventory and cost-effective sealing solutions.

Requirements:

• High chemical resistance
• Must withstand aggressive chemicals and operate in steam up to +150 °C / +302 °F
• High cleanliness

Solution:
Isolast® FFKM Perfluoroelastomer bonded to metal consolidated three parts into one. The resulting design of sealing element proved to be highly cost effective. Total cost was reduced by extending replacement intervals, a reduction in the amount of sealing material required and lower assembly costs. The component proved extremely effective and the same concept is being used across the customer’s product range.

Contact us

+886-423828886

Field-proven in extreme gas and liquid handling situations, a number of variations of Turcon® Variseal® spring-energized seals are especially suited to the most demanding of semiconductor sealing applications, including high vacuum and corrosive environments.

Turcon® Variseal® NW 

The Turcon® case of this flange seal encompasses the energizing spring in such a way that there can be no possible contact between the spring or spring cavity and system media. It is ideal for semiconductor applications where it can successfully operate in a vacuum and is proven in fluorine gas.

Features of the Turcon® Variseal® NW seal:

• Operates in extreme temperatures from -253 °C/ -423 °F to +260 °C/ +500 °F
• Vacuum capability in air to 10-9mbar/ l/s
• Excellent wear and friction characteristics
• Compatible with virtually all media and gases including fluorine gas at high temperature
• Available in custom sizes and standard dimensions with easy retrofit of current NW elastomer seals

Turcon® Variseal® PS™
This high-performance seal has been designed with a Turcon® PTFE based sealing body and encompasses a polymeric spring. Using the system media pressure, it is engineered to energize the seal precisely at low pressures, while maintaining high-pressure sealing integrity. The Turcon® Variseal® PS™ has ultra-low leach out impurities as per SEMI standard F57-0301 and minimal outgassing, making it ideal for use in semiconductor wet processing.

Features of the Turcon® Variseal® PS™ seal:

• Ultra-low leach out and no outgassing
• Thermal stability from -253 °C/ -423 °F to +80 °C/ +176 °F
• Vacuum sealing 5.3 x 10-8 mbar/l/s-1 (4.7 x 10-8 psi/in3/s-1) per mm length of seal circumference
• Excellent wear and friction characteristics
• Compatible with virtually all chemicals
• Available in standard and custom seal designs

Turcon® Variseal® Ultra-Clean™
This  seal offers the ultimate in cleanliness, making it ideal for use in processing equipment where maintaining an ultra-clean system is top priority. In the unique design of Turcon® Variseal® Ultra-Clean™, the spring required to activate the seal is fully enclosed within a Turcon® case. This means metal extractables are totally excluded, an important factor in semiconductor fabrication where the minutest contamination can destroy the effectiveness of wafers.

Features of the Turcon® Variseal® Ultra-Clean™ seal:

• Operates in extreme temperatures from -253 °C / -423 °F to +260 °C / +500 °F
• Withstands high pressures in excess of 100 bar / 1450 psi
• Excellent wear and friction characteristics
• Compatible with virtually all media
• Suitable for piston, rod, face rotary, reciprocating and static situations
• Easy retrofit into standard AS-568 O-Ring and Variseal® grooves

Contact us

+886-423828886

The Isolast® PureFab® range provides the best performance in aggressive front-end processes including deposition, etch, ash/strip, plasma cleaning, and thermal processing such as atomic layer deposition.

To ensure purity of product, all Isolast® PureFab® seals produced and packed in a Class 100 (ISO5) cleanroom environment.

lsolast® PureFab® JPF10:

• Fully organic structure
• High purity
• Excellent fluorine and oxygen radical plasma resistance
• Low particle generation
• High-temperature stability over +300 °C
• Excellent chemical resistance, including in steam and amines
• Suitable for processes including dry etching, stripping and remote plasma cleaning

lsolast® PureFab® JPF20:

• Advanced nanoparticle filler system providing minimal particle generation
• Maximum resistance to aggressive ion and radical rich plasma chemistries
• Excellent high-temperature stability to +320 °C
• Suitable for use in all etch processes and critical tool locations where there is a requirement for extreme plasma resistance
• Isolast® PureFab® JPF21:
• Proprietary filler system provides excellent oxygen plasma resistance and dimensional stability
• Minimum particulation in NF3 plasma
• Superior sealing force retention over long durations even at temperatures over +300°C extends seal life
• Suitable for etch, deposition and diffusion processes

Isolast® PureFab® JPF30:

• Non-filled, translucent extreme purity material
• Extremely low trace metal content
• Unmatched thermal stability performance compared to competitors’ translucent materials, even at +300 °C
• Suitable for ash and strip processes as well as applications that require low-sealing force

Other materials in the Isolast® PureFab® range:

Isolast® PureFab® J9675:

• Fully organic formulation with excellent resilience
• Ultra-low outgassing performance for advanced node photolithography applications
• Suitable for damping applications where outgassing properties are critical

Isolast® PureFab® J9685:

• Outstanding thermal resistance
• Very low compression set
• Operates in high-temperature thermal processes up to 325°C
• Suitable for thermal processes such as ALD, oxidation/diffusion etc 

Isolast® PureFab® J9610:

• Superior chemical resistance for wet process applications
• Very low extractables in aggressive wet process chemicals
• Suitable for CMP, ECD and wet etch applications

Contact us

+886-423828886

A wide range of high performance, high modulus thermoplastics are available for use as custom-molded and machined components. Grades can optimize operation on structural, chemical, electrical and high-performance bearing applications.

Custom and near-net molded shapes save machining time and money, while properties can be matched to requirements with additives. High modulus materials provide excellent chemical compatibility and wear properties.

Engineered thermoplastics are ideal for many semiconductor applications, such as wafer processing and handling, including bearings and bushings.

Parts can be combined with other machined parts and seals to make sub-assemblies, which improve performance and simplify product assembly processes. Plastic injection molded and machined parts are also often used as inserts for products such as overmolded Isolast® FFKM wafer carrier seals, where increased rigidity is needed to ease product assembly or to obtain improved stability.

Contact us

+886-423828886

Constructed from one or multiple Turcon® Polytetrafluoroethylene-based sealing elements, which are mechanically retained in a precision machined metal body, Turcon® Varilip® PDR (Performance, Durability, Reliability) rotary shaft seals provide positive dynamic sealing at high rotary speeds.

Characterized by low friction and stick-slip-free running, the seal reduces temperature generation, permits higher peripheral speeds and lowers power consumption.

Tests show that Turcon® Varilip® PDR requires only around 50 percent of the torque of a radial oil seal when running in Fomblin® oil, commonly used in semiconductor vacuum pumps. This results in a long-service life, with maximized mean time between planned maintenance and greater productivity.

Benefits of Turcon® Varilip® PDR seals include:

• Low-friction to facilitate reduced power loss and friction-induced heat
• Unique self-lubricating hydrodynamic feature to further reduce friction
• Advanced geometries engineered to give excellent performance in almost every high-speed rotary situation
• Multiple lip configurations to address most sealing needs
• Material compatible with virtually all media
• High speed capability up to 100 meters per second / 19,680 feet per minute
• Wide operating temperature range from -60 °C to +200 °C / -76 °F to 392 °F
• Options available for dry-running applications and for soft shafts
• Unlimited shelf life with no special storage requirements

Contact us

+886-423828886