- 真空設備包含 PVD/CVD/ALD/Evaporator。
- 自製多靶共焦濺鍍與磁控濺鍍系統,可濺鍍金屬電極、金屬氧化物、合金材料,鍍膜均勻性 <5%。可依需求設計立式或臥式濺鍍模式。
- 為既有真空腔體提供抽氣系統設計與解決方案。
- 極限真空可達 <4.0E-07 Torr
- 真空漏率 <5.0E-10 TorrL/s @He
- 基板具有加熱功能 Max. 800C
Advanced Thin Film Deposition & Vacuum Systems
Comprehensive Deposition Equipment Portfolio
Provides a full range of thin film equipment, including PVD, CVD, ALD, and Evaporator systems.
In-House Sputtering Systems & Custom Design
Features proprietary multi-target confocal sputtering and magnetron sputtering technologies capable of depositing metal electrodes, metal oxides, and alloy materials with the film uniformity of <5%. Custom designs available in both vertical and horizontal sputtering configurations.
Pumping System Integration & Solutions
Delivers complete vacuum pumping system engineering and customized solutions for existing vacuum chambers.
Ultra-High Vacuum Performance
Ultimate Vacuum: <4.0E-07 Torr
Vacuum Leak Rate: <5.0E-10 Torr L/s @ He
High-Temperature Substrate Heating
Equipped with high-precision substrate heating capabilities reaching up to max. 800C.