Meaglow is excited to be at SEMICON Taiwan, drop by and chat
Overview
Meaglow produces a range of plasma sources, including custom plasma sources, based on its patented hollow cathode technology. To date we have sold over 190 units to 16 different countries with growing sales to original equipment manufacturers. Our customers include the NASA Goddard Space Flight Center, LAM Research, US Naval Research, and many more.
Legacy ICP and microwave plasma sources include a dielectric window, often made of quartz or sapphire, these windows can be etched causing oxygen contamination in non-oxide films. Meaglow's hollow cathodes are all metal elliminating that source of oxygen contamination.
We are happy to work closely our customers to help them find solutions to their problems and have also built some custom made ALD systems (systems not available elsewhere) when customer needs arise.