Micro-Epsilon Taiwan

新北市,  Taiwan
http://micro-epsilon.tw
  • Booth: K2288

High precision sensor & solution provider, Micro-Epsilon.

Overview

Micro-Epsilon Taiwan is a daughter company of Micro-Epsilon Group.

Micro-Epsilon is among the leading sensor manufacturers worldwide. For more than 50 years we have continuously offered reliable, high performance, unique solutions particularly when high precision measurement or inspection is required. Our product range covers sensors for the measurement of distance and displacement, sensors for IR temperature measurement and color detection, as well as systems for dimensional measurement and defect detection.

Innovative products that provide the very highest levels of precision are created through intensive, research and development processes, unique know-how and a broad network of collaborative operations, which are essential for such high performance measurement systems.We understand that our customers are our business partners, which creates a win-win situation for both parties. Our products often provide customers with a genuine competitive advantage. However, this is only the case if the products are higher precision and so provide a clear, decisive competitive edge. With more precision.

  Products

  • Inductive sensors (eddy current) 渦電流位移計
    電感式感測器使用渦電流原理，以非接觸方式量測位移、距離、位置、振動和振盪。 並特別適用於惡劣工業環境中（高低壓力、髒污、高低溫度）高精度之量測需求。 Micro-Epsilon 電感式感測器可提供超高精度至奈米級精度。

    標準型錄多達近百種探頭供客戶選擇，若您有特殊的需求如 超高溫、高壓、高速等需求，歡迎來信洽詢非標準目錄特規產品。...

    1. 非接觸式量測導磁或非鐵磁材料的位移，距離和位置
    2. 適用於苛刻的工業環境：污垢，壓力，溫度
    3. 高解析度與溫度穩定性
    4. 高速取樣頻率適用於高速的量測任務
    5. 可客製化的探頭與控制器
    6. 堅固的工業級感測器設計
    7. 全面性的產品陣容可對應多種應用需求
  • Confocal 彩色共焦位移計
    confocalDT 感測器產品系列代表了彩色共焦量測技術的最高精準度。這些感測器可對透明物體的距離和厚度進行高精度和快速測量。此外，創新的控制器和感測器技術可以確保在所有表面上都能保持高訊號穩定性。高性能的感測器產品組合能解決廣泛的量測任務，例如在平面玻璃生產、量測機器和半導體機械製造中...

    • 以極高的解析度與量測速率進行距離與厚度量測
    • 自動化
    • 被動式測量系統，非常適合真空中的應用
    • 和生產監控的理想選擇
    • 幾乎不受表面影響，即使是鏡面和玻璃也不例外
    • 極小而穩定的量測點，可量出最細微的細節
    • 奈米級的精確解析度
    • 具有理想訊噪比的工業級控制器
    • An ideal choice for automation and production line monitoring, this system enables high-speed distance and thickness measurements with nanometer-level precision resolution. Equipped with an industrial-grade controller that delivers an optimal signal-to-noise ratio, this passive measurement system is perfectly suited for ultra-high vacuum applications. It operates virtually independent of surface properties—even on mirrored and glass surfaces—while its ultra-small and stable spot size allows it to capture the finest structural details with exceptional accuracy.
  • surfaceCONTROL 3D 結構光感測器
    用於3D測量和表面檢測。感測器利用邊緣投影原理檢測漫反射表面並生成3D點雲。隨後對點雲進行評估，以辨別幾何形狀、極小缺陷和表面不連續性。Micro-Epsilon 可提供不同測量面積的感測器。這樣就可以檢測物體上最精細的結構以及大面積物體上的形狀偏差。功能強大的軟體可用於評估和參數設置。...

    1. 真正的 3D 線上量測
    2. 幾何、形狀與表面的自動光學檢測
    3. 最高精度可達 0.25 µm
    4. 直接在生產線上快速、精確地檢測各種形狀誤差
    5. 客觀評估偏差
    6. 全面的 SDK 與評估軟體
    7. 可輕鬆整合至所有常見的 3D 影像處理軟體
    8. Designed for true 3D in-line measurement, Micro-Epsilon’s structured light technology enables automated optical inspection of geometries, shapes, and surface features directly on the production line. Delivering ultra-high precision down to 0.25 µm, the system rapidly and accurately detects shape deviations, providing objective, highly reliable quality evaluations in real time. For seamless factory integration, it comes equipped with a comprehensive SDK and evaluation software, allowing easy compatibility with all standard 3D image processing frameworks.
  • interferoMETER 白光干涉儀
    具有亞奈米解析度，測量範圍和偏移距離相對較大，可實現穩定的測量結果。干涉儀有 4 個系列：用於精確量測距離的 IMS5400-DS、用於精確量測厚度的 IMS5400-TH 、用於皮米解析度距離測量的真空適用型 IMS5600-DS以及用於非接觸式測量單晶矽片厚度的 IMS5420-TH...

    1. 以奈米精度進行絕對距離量測
    2. 精確的厚度量測與感測器的距離無關
    3. 多峰距離量測及多層厚度量測
    4. 無與倫比的工業應用精準度
    5. 同類最佳： 解析度 30 皮米 (IMS5600)
    6. 全新評估演算法與主動溫度補償，提供高訊號穩定性
    7. 補償距離大
    8. 透過 Web 介面進行簡單的參數設定
    9. 工業最佳化的感測器，具有堅固的金屬外殼和彈性線材
    10. 適合真空環境的感測器和線材
    11. 靈活的工業整合，可在現場快速調整

    Designed for absolute distance measurement with nanometer precision, Micro-Epsilon’s white light interferometers deliver unmatched accuracy for demanding industrial applications. The system enables precise, distance-independent thickness measurements, as well as multi-peak distance and multi-layer thickness evaluation. Highlighted by the class-leading IMS5600 with an extraordinary resolution of 30 picometers, it leverages new evaluation algorithms and active temperature compensation to ensure exceptional signal stability over a large measuring offset. Engineered for seamless factory integration, the ruggedized metal sensor head and flexible cables are suitable for ultra-high vacuum environments and allow fast, adaptable field configuration—all conveniently parametrized via an intuitive Web interface.

  • scanCONTROL線雷射輪廓儀
    scanCONTROL 型號提供多種量測範圍，專為inline應用設計。無論是簡單的輪廓量測、機器人導引、表面檢查還是高精度的 3D 幾何檢測，這些雷射掃描儀都能為穩定的生產製程提供精確的量測數據。

    新型 scanCONTROL 8500 系列憑藉內建的 SMART 評估功能提供卓越性能。得益於 4K 感光矩陣與最先進的綠光雷射技術，該掃描儀以其非凡的準確度、高訊號穩定性以及同級產品中最佳的量測率令人矚目。...

    1. 內建控制器的精巧型雷射掃描儀 —— 無需外部控制單元
    2. 同級產品中的最佳性能：快速、可靠且具備高解析度
    3. 整合 SMART 功能，內建多種量測程序
    4. 支援 GenICam / GigE Vision，可用於處理 3D 點雲
    5. 紅光 / 藍光 / 綠光：全方位雷射光源，適用於所有量測物
    Featuring a compact design with an integrated controller, the LLT8500 line laser profile sensor eliminates the need for an external control unit while delivering best-in-class performance through fast, reliable, and high-resolution measurement. It comes equipped with integrated SMART functions and built-in measurement programs for automated evaluation, alongside support for GenICam and GigE Vision standards to enable seamless 3D point cloud processing. Available in red, blue, and green laser light options, this versatile scanner provides a comprehensive optical solution suited for all target surface materials.
  • confocalLINE CLI8500 高精度智慧型線共焦感測器
    ● Industry-leading 2,688 X-axis points, with 2.7 µm pitch
    ● Z-axis depth of 2.1 mm with < 100 nm resolution
    ● Integrated controller enables 3D edge computing
    ● Applications : Micro Bump| Wafer Topography | Defect



    ...

    • Compact Design with SMART Data analysis directly in the sensor

    量測範圍 Z: 2.1 mm / X: 7 mm

    解析度 X: 2.7 um / Z < 100 nm

    2,688點 / profile

Categories

203 Equipment, Inspection & Measurement
  • Wafer; Substrate Metrology; Topology; Nanotopography; Flatness Measurement; Crystalline Orientation
    • 400 Components, Parts & Accessories
  • Sensors
    • 401 Sub-systems
  • Optics; Lens Products; Auto-Focus Systems
  • Temperature Sensing; Control; Recirculators; Chillers; Heat Exchangers

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