Sealink Corp.

Seoul,  Korea (South)
http://www.esealink.com
  • Booth: M0556

Diffusion Furnace R-Axis, LPCVD. Rotary Vacuum Sealing Unit

Overview

Sealink Vacuum Rotary Sealing Units are Not magnetic ferrofluid Seal.

We are looking forward to meeting you at ‘Semicon Taiwan 2026’. After your visit, we have a certainty that we can give you the optimal sealing solution for your projects based on the experiences of supplying Foundary Company. We are specialized in manufacturing and designing Rotary/Linear feedthroughs and Rotary unions.

Sealink’s feedthroughs are applied with the unique sealing technology. There are some distinctive features.

  • Working at high pressure and high vacuum condition.
  • Various types of media can be sealed: gas, liquid, etc.
  • Our sealing technology is not based on ferrofluids or magnetics.

Competitive advantages

Type

Condition

Media

Price

Magnetic Seals

Vacuum only

Gas

High

Sealink Seals

Vacuum & Pressure

Gas, Liquid, etc

Reasonable
 

Applications : Semiconductor Industries

  • CVD, MOCVD, LPCVD, PECVD, PCD, ALD, CMP, OLED, LCD, FPD, Wafer handling, Vacuum deposition,

Ion Implanter Etcher, Asher, Edge Grinder, Scrubber, RTP, Sputter, Lamp, Autoclave, Wafer robot etc.

  Products

  • Linear Feedthrough
    We offer customization of standard linear feedthroughs with a variety of options such as pressure, vacuum, stroke, speed and temperature requirements. Therefore, existing feedthroughs can be replaced with Sealink products without additional equipment....

    • • Specifications of Linear Feedthrough
    Vacuum Max. 10-8 Torr, Max.10-6 Pa
    Pressure Max. 50 bar (PV Limits : Max. 50)
    Leakage
    Rate    		 Vacuum Up to 7.5 x 10-10 Pa · m3 / s by Helium Leak Detector
    Pressure Up to 0.5 psi/min by Nitrogen Gas
    Stroke of Shafts 0 to 4,000mm
    Temperature Range -20 ~ 150℃ (-4 ~ +300°F) without cooling system
    -20 ~ 400℃ (-4 ~ +750°F) without optional cooling system
    Media Type Gas and Liquid (Reactive Gas, Inert Gas, Water, Oil, Steam, Air, Chemical,
    Coolant, and a variety of other media)
    Speed Max. 15m/s
    Shaft Diameter ø6 ~ ø1,100mm
    Material Housing 304 or 316L Stainless Steel or others
    Shaft 304 or 316L Stainless Steel or others
    Bearing SUJ2 High Carbon Chrome Bearing Steel or others.
  • Rotary Feedthrough
    We offer standard rotary feedthrough products with solid or hollow shafts and customized feedthrough products optimized for the operating environment of the equipment, such as pressure, vacuum, speed and temperature....

    • • Specifications of Rotary Feedthrough
    Vacuum Max. 10-8 Torr, Max. 10-6 Pa
    Pressure Max. 50 bar (PV Limits : Max. 50)
    Leakage
    Rate    		 Vacuum Up to 7.5 x 10-10 Pa · m3 / s by Helium Leak Detector
    Pressure Up to 0.5 psi/min by Nitrogen Gas
    Temperature Range -20 ~ 150℃ (-4 ~ +300°F) without cooling system
    -20 ~ 400℃ (-4 ~ +750°F) without optional cooling system
    Media Type Gas and Liquid (Reactive Gas, Inert Gas, Water, Oil, Steam, Air, Chemical,
    Coolant, and a variety of other media)
    Speed Max. 15m/s
    Shaft Diameter ø6 ~ ø1,200mm
    Material Housing 304 or 316L Stainless Steel or others
    Shaft 304 or 316L Stainless Steel or others
    Bearing SUJ2 High Carbon Chrome Bearing Steel or others.
    Stroke of Shaft 0 ~ 4,000mm
  • Rotary Union
    We offer single port or multi ports to transfer different types of materials simultaneously, both liquid and gaseous. We also supply products optimized for various operating environments such as pressure, vacuum, speed, number of ports, and temperature....

    • • Specifications of Rotary Union
    Vacuum Max. 10-8 Torr, Max. 10-6 Pa
    Pressure Max. 50 bar (PV Limits : Max. 50)
    Leakage
    Rate    		 Vacuum Up to 7.5 x 10-10 Pa · m3 / s by Helium Leak Detector
    Pressure Up to 0.5 psi/min by Nitrogen Gas
    Temperature Range -20 ~ 150℃ (-4 ~ +300°F) without cooling system
    -20 ~ 400℃ (-4 ~ +750°F) without optional cooling system
    Media Type Gas and Liquid (Reactive Gas, Inert Gas, Water, Oil, Steam, Air, Chemical,
    Coolant, and a variety of other media)
    Speed Max. 15m/s
    Shaft Diameter ø15 ~ ø1,100mm
    Material Housing 304 or 316L Stainless Steel or others
    Shaft 304 or 316L Stainless Steel or others
    Bearing SUJ2 High Carbon Chrome Bearing Steel or others.
    Number of Ports 1 ~ 14ports
  • Diffusion Furnace R Axis
    Our R axis, which applies the principle of Electrohydrodynamic Lubrication (EHL), is a new technology rotational axis that operates with a non-ferrofluid method. It is very suitable for diffusion furnace equipment in semiconductor processes....

    • • Specifications of Diffusion Furnace R Axis
    Vacuum Max. 10-8 Torr, Max. 10-6 Pa
    Pressure Max. 50 bar (PV Limits : Max. 50)
    Leakage
    Rate    		 Vacuum Up to 7.5 x 10-10 Pa · m3 / s by Helium Leak Detector
    Pressure Up to 0.5 psi/min by Nitrogen Gas
    Temperature Range -20 ~ 150℃ (-4 ~ +300°F) without cooling system
    -20 ~ 400℃ (-4 ~ +750°F) without optional cooling system
    Media Type Gas and Liquid (Reactive Gas, Inert Gas, Water, Oil, Steam, Air, Chemical,
    Coolant, and a variety of other media)
    Speed Max. 15m/s
    Shaft Diameter ø6 ~ ø1,200mm
    Material Housing 304 or 316L Stainless Steel or others
    Shaft 304 or 316L Stainless Steel or others
    Bearing SUJ2 High Carbon Chrome Bearing Steel or others.
    Stroke of Shaft 0 ~ 4,000mm
  • High Pressure Hydrogen Annealing Device for R Axis
    Our High Pressure Hydrogen Annealing Device for R Axis, which applies the principle of Electrohydrodynamic Lubrication (EHL), is very suitable for high pressure hydrogen annealing process in semiconductor processes...

    • • Specifications of High Pressure Hydrogen Annealing Device for R Axis
    Vacuum Max. 10-8 Torr, Max. 10-6 Pa
    Pressure Max. 50 bar (PV Limits : Max. 50)
    Leakage
    Rate    		 Vacuum Up to 7.5 x 10-10 Pa · m3 / s by Helium Leak Detector
    Pressure Up to 0.5 psi/min by Nitrogen Gas
    Temperature Range -20 ~ 150℃ (-4 ~ +300°F) without cooling system
    -20 ~ 400℃ (-4 ~ +750°F) without optional cooling system
    Media Type Gas and Liquid (Reactive Gas, Inert Gas, Water, Oil, Steam, Air, Chemical,
    Coolant, and a variety of other media)
    Speed Max. 15m/s
    Shaft Diameter ø6 ~ ø1,200mm
    Material Housing 304 or 316L Stainless Steel or others
    Shaft 304 or 316L Stainless Steel or others
    Bearing SUJ2 High Carbon Chrome Bearing Steel or others.
    Stroke of Shaft 0 ~ 4,000mm

Categories

201 Equipment, Flat Panel Display
  • Seal Patterning Equipment
    • 202 Equipment, General Use
  • Sealing; Bagging; Packing Equipment
    • 207 Equipment, Process
  • Chemical Mechanical Polishing (CMP); Electro Polishing, Mechanical Polishing Equipment
  • Deposition; Chemical Vapor (CVD); MOCVD; PECVD; LPCVD; ALD; REALD; MVD
  • Deposition; Physical Vapor (PVD); Sputtering; Evaporation Equipment
  • Etching; Stripping; Ashing - Dry and Wet Equipment
  • Ion Implantation Equipment
    • 400 Components, Parts & Accessories
  • Bearings; Shaft Collars
  • Gaskets; Seals; O rings; Elastomers; Resins
  • Magnetic Components; Heads
  • Vacuum Systems Components & Accessories (optical monitors; Sputtering target fixtures; lubricants; p
    • 401 Sub-systems
  • Hydraulic Systems

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