Shenzhen Naso Tech Co.,Ltd

深圳,  广东省 
China
https://www.naso-tech.com
  • Booth: J3255

Overview

深圳市纳设智能装备股份有限公司成立于2018年， 专注于半导体、光伏、锂电及其他先进材料领域所需高端薄膜沉积设备的研发、生产与销售，公司致力“成为全球先进材料制造装备的引领者”，核心团队以剑桥大学博士、研究员及资深行业专家为班底，始终坚持自主创新，以高端装助力先进材料在新能源汽车、充电桩、光伏、轨道交通、智能电网、人型机器人、低空经济、航天航空等诸多领域的应用。

公司以剑桥大学博士、研究员及资深行业专家为班底，组建了一支在薄膜沉积设备与先进材料制造工艺领域具备深厚的积淀核心技术团队，累计已申请专利超150项，先后荣获国家级专精特新“小巨人”企业、深圳市潜在独角兽及博士后创新基地等资质，持续以高端装备赋能先进材料在新能源汽车、轨道交通、航天航空等战略领域的广泛应用。

  Products

  • SiC Epitaxy Reactor
    Silicon Carbide (SiC) epitaxy systems are specialized tools dedicated to epitaxial layer growth—the core process in SiC chip manufacturing. This process is a critical step in fabricating power electronic devices, such as diodes and power semiconductors....

    • Compatible with 200mm / 150mm wafers.
    Low Cost of Ownership (CoO): Innovative planar chamber design significantly reduces graphite consumable costs.
    Precision Zone-Level Control: Independent C/Si ratio adjustment via 5-zone gas inlets allows for highly flexible process tuning.
    Simplified Maintenance: Routine upkeep requires only simple lapping of the planar graphite susceptor, minimizing downtime.
  • ATOMIC LAYER DEPOSITION(ALD) EQUIPMENT
    Based on the principle of self-limiting surface chemistry, ALD systems maintain high film uniformity during high-rate deposition....

    • Modular Design: Facilitates rapid fault isolation and localization, significantly reducing maintenance costs. This improves both tool servicing and spare parts management efficiency while enabling greater compatibility and flexibility.

    • Highly Efficient and Uniform Gas Showerhead: Features a high-density hole layout paired with proprietary gas diffusion paths, ensuring superior uniformity and rapid, comprehensive surface coverage

Categories

207 Equipment, Process
  • Deposition; Chemical Vapor (CVD); MOCVD; PECVD; LPCVD; ALD; REALD; MVD
  • Epitaxy Equipment; Epi Reactors; Molecular Beam Epitaxy (MBE); Atomic Layer Epitaxy (ALE)

    • Send Email

    Type your information and click "Send Email" to send an email to this exhibitor. To return to the previous screen without saving, click "Reset".

    Loading ...

    :
    :


    Legend
    Available Timeslot
    Scheduled Appointment
    Personal Appointments
    Appointment Request
    Blocked Timeslot
    Restricted Timeslot
    Cancelled
    Declined