Trion Technology

2131 Sunnydale Boulevard
Clearwater,  FL  33765

United States
  • Booth: 5438

Plasma Etch & Deposition Systems Manufacturer for 25+ years

Trion Technology, Inc. provides versatile plasma equipment (ICP-RIE, PECVD, PVD, Ashers, and more) to enable our customers in the MEMS, Semiconductor, LED, RF Power, F.A., Opto-, III-V, Wafer Level Packaging, Thin Film Head, and Solar industries.

Products include: Plasma Etch Systems, Plasma Deposition Systems, Stripping Systems, GaN Etch, GaAs Etch, SiO2 Etch, Si02 Deposition, Si3N4 Etch, Si3N4 Deposition.

Our products feature the smallest footprint and lowest cost systems in the industry with proven production reliability. If you wish anything from full-blown production cluster tools to a simple laboratory system, Trion makes it.
+1 727-461-1888

 Press Releases

  • Founded in 1989, Trion Technology, Inc. of Clearwater, FL, USA supplies a variety of plasma etch and deposition equipment for the manufacturing of compound semi-conductors, MEMS, and optoelectronics.

    Recently the company announced the unveiling of their new website, 
    Bright, aesthetic and upscale, the new site is replete with user-friendly information.

    Trion's new website includes:

    • Expanded product line
    • More application notes, process information
    • Additional product demonstration videos
    • Increased international tradeshow and conference schedule
    • Now mobile-friendly - view on your tablet or phone
    • Subscribe to blogs via RSS

    The “Process” Section is a useful source of basic information about plasma technology. This section also provides recipes, technical articles and SEMS, with a spotlight on results obtained by Trion customers and universities.

    For more information about Trion Technology, please call their main number +1 727-461-1888 or email


  • Phantom RIE
    Reactive Ion Etcher...

  • The Phantom RIE is designed to supply research and failure analysis laboratories with state-of-the-art plasma etch capability using single wafers, dies or parts using fluorine and oxygen based chemistries. The system has a compact, modular design built on a space-saving platform.

    MEMS, Solid State Lighting, Failure Analysis, Research & Development, Pilot Line.

    For more information:

  • Apollo Stripper
    Asher, Stripping System...

  • The cost of new stripping systems has escalated to unreasonable levels. Trion has solved this critical problem. The Apollo Stripper is a compact, inexpensive, and versatile system which can be configured for a 200mm or 300mm Chuck. By employing RF bias power, difficult to remove layers of resist can be removed at low temperatures. As required by application, this system can incorporate a microwave source (which is both reliable and free from typical microwave tuning problems) or ICP technology.

    Applications: MEMS, Compound Semiconductor, Pilot Line Production.

    For more information:

  • Oracle
    Production Cluster Tool...

  • The Oracle is the smallest and most flexible full production cluster system on the market. The system consists of a Central Vacuum Transport (CVT), Vacuum Cassette Elevators and up to four Process Reactors. These process reactors are docked to the central loadlock and run in production-mode or can be operated independently. The Oracle can also be configured for either the laboratory environment (with single wafer loading) or for full production (with vacuum cassette elevators).

    Because the Oracle accommodates up to four separate process chambers, there are many possible process combinations, including ash, etch, and deposition modules. Processes are safely run without atmospheric contamination since all chambers are vacuum loadlocked.

    Applications: Compound Semiconductor, Photonics, Research & Development, Pilot Line, Production.

    For more information:

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