Brooks Instrument

407 W. Vine St.
Hatfield,  PA  19440-0903

United States
  • Booth: 7723

EtherCAT interface available on GF100 Series MFCs.

Since 1946, Brooks Instrument has been a leader in precision fluid measurement and control technology with a proven history of innovation and the world’s largest installed base of mass flow controllers. Brooks global factory certified service and support for all products, including our legacy brands - Tylan, Unit, Mykrolis and Celerity – ensures optimum performance throughout the life of your instrumentation.

Visit our booth to learn more about GF100 Series MFCs now enhanced with the high-speed EtherCAT interface. The fastest and most accurate MFCs available have also just been improved with better zero stability, reduced valve leak-by and enhanced pressure transient insensitivity.

Our portfolio includes:

  • Ultra-high purity mass flow controllers and meters 
  • High-accuracy liquid mass flow controllers
  • Capacitance manometers and pressure control products
  • Vapor delivery modules, and 
  • Purge meters
Brooks Instrument has manufacturing locations, sales, and service offices in the Americas, Europe, and Asia. For more information on flow solutions, products, or sales contacts please visit

 Press Releases

  • Company to exhibit the industry’s most accurate and reproducible deionized water vapor delivery module, along with its GF100 Series Mass Flow Controller with EtherCAT® to improve semiconductor process yields

    HATFIELD, Pa. (June 28, 2017) – Brooks Instrument will be exhibiting at SEMICON West 2017 with a new vaporization product, mass flow controllers with high-speed EtherCAT®, and a broad range of other mass flow meters, controllers and capacitance manometers for semiconductor manufacturing.

    The show runs July 11-13 at the Moscone Center in San Francisco. Brooks Instrument will be located in the West Hall at booth 7723.

    With more than 70 years of history in new technology developments, Brooks Instrument is focused on improving the precision and performance of mass flow, pressure and vacuum technologies to help enable advanced semiconductor manufacturing.

    A world leader in advanced flow, pressure, vacuum and vapor delivery solutions, Brooks Instrument will showcase key components in its portfolio designed to meet critical gas chemistry control challenges and improve process yields for 10nm and beyond nodes. This includes the new VDM300 vapor delivery module (VDM) as well as the company’s proven GF100 Series mass flow controllers (MFC) with high-speed EtherCAT® connectivity.

    VDM300 Vapor Delivery Module: The self-contained VDM delivers precise amounts of ultra-high-purity deionized water (DIW) vapor to help ensure accurate and repeatable processing for functions such as plasma etching and photoresist stripping. Using proven vapor-draw vaporization technology and reliable component designs from previous Brooks Instrument vaporizers, the VDM300 features an improved graphical user interface and firmware.

    Full-scale flow capacity is up to 3,000 standard cubic centimeters per minute (sccm), with a better control turndown ratio of 20:1. Flow accuracy is ±1.0 percent of set point at 10-100 percent full-scale, while repeatability is less than ±0.2 percent of full-scale. In addition, the flow rate is independent of DIW inlet pressure fluctuations.

    With its optional EtherCAT interface, the VDM300 joins the Brooks Instrument line of EtherCAT-enabled products, which also includes the company’s proven GF100 Series MFCs. The VDM300 uses the same signal processing and calibration techniques as the GF100 Series.

    GF100 Series MFC with High-Speed EtherCAT Connectivity: Brooks Instrument has enhanced its industry-leading GF100 Series MFCs with high-speed EtherCAT interfaces for both high-flow and low-flow applications.

    Responding to rapidly evolving requirements for next-generation tools and fabs, the GF100 Series includes several features to help boost process yields and productivity:

    • Embedded diagnostics to leverage real-time EtherCAT data acquisition capabilities for advanced fault detection and classification;
    • An ultra-stable flow sensor (less than ±0.15 percent of full-scale drift per year) enables tighter low set point accuracy and reduces maintenance requirements;
    • Improved valve shutdown reduces valve leak-by, minimizing potential first wafer effects;
    • Enhancements to the GF100 advanced pressure transient insensitivity to less than one percent of set point with five PSI per second pressure perturbations, which reduces crosstalk sensitivity for consistent mass flow delivery.

    For more information about the complete range of Brooks Instrument products and solutions for semiconductor applications, visit

    EtherCAT® is a registered trademark and licensed by Beckhoff Automation GmbH

    About Brooks Instrument:

    Since 1946 Brooks Instrument has been a leader in precision fluid measurement and control technology. Providing instrumentation for flow, pressure and vaporization, the company serves customers in semiconductor manufacturing, fiber optic and thin film manufacturing, solar cell, LED, alternative energy, oil and gas refining; chemical and petrochemical research; and pharmaceutical and biopharmaceuticals.

    With manufacturing, sales, and service locations in the Americas, Europe, and Asia, Brooks Instrument has the world’s largest installed base of mass flow controllers. Its broad family of products includes legacy brands such as UNIT Instruments, Tylan, Key Instruments, and Celerity.

    For more information, please visit The company is also on LinkedIn ( and YouTube (


  • GF100 Series Ultra-High Purity MFCs
    The Industry’s Fastest, Most Accurate MFCs Enhanced with the Speed of EtherCAT ® ...

  • • Ultra-fast response: Up to 3X faster response and settling time compared to other MFCs
    • Embedded diagnostics leverage real-time EtherCAT data acquisition capabilities
    • Communication protocols: Analog, EtherCAT, DeviceNet™ & RS-485
  • GF135 Series Real-Time Flow Error Detection MFCs
    Keep critical flow processes on-target and maximize throughput with the GF135 Advanced Diagnostics Pressure Transient Insensitive (PTI) mass flow controller....

  • The world’s first “smart” mass flow controller is a true game changer: It performs integral rate-of-decay flow measurement without stopping the flow of process gas. It allows semiconductor manufacturers to verify process gas accuracy, check valve leak-by and monitor sensor stability in real time without removing the flow controller from the gas line.

    Combined with an all-metal wetted flow path, ultra-fast settling times and industry-leading process gas accuracy, the GF135 PTI MFC has the potential to transform the productivity and throughput rates for a wide range of deposition processes.

  • GF101 Series High-Flow MFCs
    Fast responding, repeatable delivery of process gases with full-scale flow rates up to 300 slpm available in high and ultra-high levels of purity....

  • Designed for semiconductor, MOCVD and other gas flow control applications, the GF100 series exceeds the semiconductor industry standard for reliability, ensuring repeatable, highly stable performance over time. Standard MultiFloTM technology enables one MFC to support thousands of gas types and range combinations without removing it from the gas line or compromising on accuracy.

    The result: increased process flexibility and efficiency combined with the industry’s highest levels of process gas purity to help maximize yields and productivity.

 Additional Info

New Exhibitor:
New Products:
Displaying Equipment:
Product Demonstrations:

Send Email

Type your information and click "Send Email" to send an email to this exhibitor. To return to the previous screen without saving, click "Reset".