VAT Vakuumventile AG

655 River Oaks Pkwy
San Jose,  CA  95134

United States
  • Booth: 6152

Passion. Precision. Purity.

VAT is the global technology leader and supplier of high-end vacuum valves.

VAT vacuum valves are mission-critical components in the semiconductor industry, in research and science as well as in advanced manufacturing processes of innovative products such as portable devices, flat screen displays or solar panels. We develop our products in close cooperation with the leading equipment suppliers worldwide. With manufacturing sites in Haag (Switzerland) and Penang (Malaysia), subsidiaries in the USA, Asia and Europe we are where our clients are.  Fifty impressive years of experience in the vacuum industry, and over 1,400 highly-qualified employees guarantee that clients benefit from outstanding products and related value-added service.

We welcome you to stop by VAT Booth #6152 and meet our team!

 Press Releases

  • VAT was founded in 1965 by Siegfried Schertler, an Austrian entrepreneur and mechanical engineer, in the town of Flawil, Switzerland. The company relocated soon thereafter to its current headquarters in Haag, Switzerland, in the Rhine Valley.

    The company originally focused on vacuum valves for use in scientific research. After several years, VAT began to diversify its product portfolio and entered the thin-film market. In 1983, VAT established Its COMVAT AG subsidiary to manufacture bellows that are used as flexible sealing elements. In 1988, VAT entered the semiconductor sector with its proprietary VATSEAL gate valve.

    As its product scope broadened, VAT also expanded its business beyond its traditional European markets by establishing both manufacturing and service operations in the US and Asia to better align its operations with those of its biggest customers. In 2008, VAT acquired Sysmec in Arad, Romania, for the machining and manufacture of components and assemblies. In 2012, VAT acquired the vacuum valves product line from Inficon AG, part of the ongoing consolidation in the vacuum valve market.

    A key development was the establishment in 2012of its Malaysian manufacturing site in Penang. Other growth actions included establishing gate valve manufacturing in Taiwan, as well as service centers in the US, Japan, South Korea, China, Singapore and Taiwan.

    VAT Group was acquired by Capvis and Partners Group in 2014, after which the company underwent substantial development, including the launch of the VATmotion operational excellence program and the expansion of the senior management team to include people with broad industry, operational and geographic experience.

    In April 2016, VAT went public with the conclusion of its successful Initial Public Offering on the SIX Swiss Exchange.


  • Wedge Valve designed for Sub-Fab applications
    High speed valve specifically designed for Sub-Fab Applications. VAT's wedge valve's are designed to operate in the dirtiest of applications and especially suited for environments with high level particles and process by-product....

  • These wedge gate valves are designed for very easy maintenance and especially suited for environments with high levels of particles and process by product.

    Whether you need a fast acting valve to quickly close upon pump failure of need to reliably isolate your dry pump for system maintenance, the series 09 is designed with your Sub-Fab application in mind.

    Made of stainless steel, the durable wedge sealing design is capable of opening against 1 bar pressure differential, and continues to be the standard for harsh process and sub-fab applications.

    Available in the following configurations:

    Actuation:  Manual or Pneumatic

    Flanges: ISO-KF, ISO-F, CF, JIS, Custom

    Sizes:  DN40, DN50, DN63, DN80, DN100 and DN160

    Elastomers:  FKM (standard), FFKM (optional)

    Feedthroughs:  Shaft feedthrough (standard), Bellows (optional), PTFE coated Bellows (optional)

    Additional Options:

    • Fast-Acting Actuator
    • Soft-pumping capability
    • Roughing Ports in standard KF sizes

  • Edge Welded Bellows
    Edge welded bellows are composed of thin gauge sheet-metal membranes that allow multi-axis flexibility and withstand environment variables such as pressure differentials and different temperature conditions without failure....

  • VAT Bellows are the European leader in production of edge-welded bellows and especially in process automation technology. In line monitoring and extensive process controls guarantee premium quality and reliable performance of our edge-welded bellows. VAT bellows can be found throughout the semiconductor industry, in the aerospace industry, in medical technology, in the field of research as well as in the automotive industry. Innovation and customer satisfaction are the driving forces behind all our efforts.

    Product specifications

    Standard membrane sizes

                Inner diameter: 4.8mm [0.19in] to 430mm [16.90in]

                Outer diameter: 12.7mm [0.50in] to 480mm [18.90in]

    Membrane material: AM350, SST 316L, Haynes 242, Inconel 625, Titanium

    Axial movement: As needed

    Lateral movement: As needed

    Combined Axial + Lateral movement: As needed

    Cycle Life: > 5 million

    End Pieces: Custom, Con-Flat Fixed/Rotatable, ISO-K, ISO-F, KF, Tube ends

    End Piece Material: SST/316L ESR, SST 304L, Inconel 625

    Global ISO8 cleanroom production environment

                ISO5 cleanroom production area available

    Final cleaning options: Standard Level, Advanced Level, High Purity Level

  • Butterfly Pressure Control Valve
    Butterfly pressure control valves for downstream applications....

  • The Vat Butterfly control valve system is the industry standard choice for applications which require fast control such as ALD or other challenging applications.

    An all new direct driven servo motor concept enables the fast actuation of the latest Vat butterfly control valve system. The integrated control unit can achieve actuation times down to 90ms.

    The series 61 control valve is available in sizes ranging from DN25-320 and DN40-100 for sealing function.  A bonded plate option offers an extended life time up to 2 Mio cycles.

    • Fast high torque actuator with high performance integrated controller
    • Extremely short control response times and position indication
    • Automatic maintenance indication
    • Service port connection
    • Excellent resistance to process contamination
    • Easy set up and installation

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