6825 Shiloh Road East, Ste B-3
Alpharetta,  GA  30005

United States
  • Booth: 6767

THERMOCOAX provides Heating Solutions for the Semiconductor and Vacuum Process industries, including single and multi-zone heated chucks, plates, and applications in almost any shape and size. We have expertise in special materials and complete heating/cooling assemblies. Our heating solutions are designed for applications requiring the strictest Temperature Uniformity up to 1000 deg. C and UHV levels. We also design and manufacture custom Thermocouple solutions for applications up to 2300 deg. C in almost any environment. - Optimization of existing vacuum thermal systems - Design, manufacture of complete heating subsytems - Development of thermal application from concept, prototyping to production - Computer modeling of heating system performance - Simulation - Experience in common and special materials - From small up to large size devices - Research and testing services - 55 years of thermal expertise

 Press Releases

  • THERMOCOAX manufactures Custom Heating and Temperature measurement solutions for each wafer production step: Deposition CVD - PECVD - MOCVD - ALD - PVD, Patterning, Doping, Etching, Testing and Packaging.

    Our solutions based on our Mineral Insulated Cables manufacturing are used also for Flat Panel Display, Flex Electronics or nanotechnology applications.

    Wether you need our standard heaters or want a custom application, THERMOCOAX can provide you with a complete solution from initial prototype engineering to final product manufacturing:

    Heating coils for Physical Vapor Deposition, Ion Source - evaporator with heater brased onto stainless steel, Heating tube - Cold ends heater coiled and brased on stainless steel, Inconel or molybdenum tube for Lithography Nanoimprint - Immersion and EUV, Hot Plates and Chucks for Chemical Vapor Deposition ALD - CVD - PECVD and MOCVD, Annealing Multi Heating Zones Ovens, Aluminum hot plates for Etching, and all silicon ISOPAD heating jacket solutions.

    The THERMOCOAX SEMICON team is at your disposal for all information request.


  • Aluminum Molded Heating Chuck for Etching process
    2 zones ZEZ cold end technology heaters and thermocouple THERMOCOAX offers custom made thermal systems, providing our customers with safer, cleaner and the most cost effective solutions....

  • THERMOCOAX  Group designs and manufactures thermal solutions which help to improve the uptime and process stability of semiconductor wafer process equipments.

    Large diameters available

    Heating temperature up to 400°C max

    High temperature uniformity on the chuck: +/-05°C at 250°C

    Grade 2 Clean packaging

    THERMOCOAX meets the requirements of the SEMICON market by proposing heating chucks with a high flatness and a low roughness

  • High Temperature Hot Plates and Chucks
    Custom high temperature uniformity hot plates and chucks for Chemical Vapor Deposition ALD - CVD - PECVD - MOCVD Construction cast or machined, sandwich or single plate...

  • THERMOCOAX mission is to develop state-of-the-art complete thermal solutions through advanced innovation from conception to prototyping rigth the way through to production.

    Material used can be aluminum, Stainless steel, inconel or other specific alloys

    Thermocoax offers a large range of exotic materials with high resistance especially to fluorinated gases.

     Suitable for vacuum deposition environment processes. Connections compatible with UHV

    Multi heating zones up to 7.

    Diameter up to 450mm, heating temperature up to 1 000°C max.

    Our heating solutions offer a high temperature uniformity and high repeatability performances.

    Fast heat up ramps and cooling circuit option.

    Custom sheath thermocouples available.

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