Integrated Dynamics Engineering GmbH

Hermannstraße 9-13,
Raunheim,  65479

  • Booth: 6367

Worldwide leader in vibration control and automation

Technology leader in vibration isolation & EMI cancellation

IDE - technology leader in vibration isolation, wafer handling and EMI cancellation
Integrated Dynamics Engineering (IDE) is a global market leader in developing and manufacturing environmental control systems, such as active and passive vibration isolation, active compensation for magnetic interference and acoustic shielding. IDE’s solutions are established and proven even for the most demanding applications in lithography, metrology, research and medical technology.

Furthermore IDE is a major supplier for wafer and mask handling robots, customized tool platforms and EFEMs for semiconductor OEMs. IDE’s product portfolio comprises a broad variety of solutions for the most ambitious industries in the fields of metrology and instrumentation.

Over 20 years of experience make IDE your reliable and competent solution provider. IDE analyzes environments with respect to application specific requirements, provides profound consulting and offers ideal solutions.

 Press Releases

  • IDE offers local service for China

    IDE’s highly trained Chinese staff can now conduct detailed site surveys, advanced training, equipment installations and repair, in addition to negotiating all sales and schedules at the local level.

    IDE’s operation in Shanghai has been operational for more than 3 years. This operation has been providing high performance isolation to the top tier of China’s Semiconductor Equipment Manufacturers as well as many of the Key Technology Laboratories of the Chinese Academy of Science.

    IDE is working “hand in hand” to assist in China’s push to become a world leading developer and supplier of high technology.

    To contact IDE and our local representatives in Shanghai, please email us at We will respond promptly. IDE looks forward to a productive conversation with you soon.

  • IDE Launches The SLT 3000 Service Lifting Tool

    The SLT 3000, an automated service lifting tool for maintaining a wide range of semiconductor systems equipment has been developed by Integrated Dynamics Engineering (IDE).

    With a lifting capacity of up to several tons, the robust and versatile SLT 3000 significantly reduces service time, service costs, and downtime while complying with all safety and cleanroom standards worldwide. It is certified cleanroom Class ISO 1 compatible in idle mode and better than Class ISO 5 in operational mode.

    The SLT 3000 service tool is especially effective in positioning or removing heavy vacuum chamber lids, the highly sensitive optical heads of metrology tools, or other precision components such as stages, robots, isolators and massive granite blocks.

    For more information on the extraordinary SLT 3000 service lifting tool from Integrated Dynamics Engineering, contact


    IDE is THE worldwide Expert and Technology Leader in high precision Environmental Control and Automation System-Platforms for the Semiconductor, Microscopy, Nanotechnology and Industrial Machining Industries. Unmatched Machine Dynamics and Control Solutions for the elimination of critical vibration, electro-magnetic and acoustic disturbances as well as Customized Material Handling and Automation Solutions for Zero Contamination Applications in Semiconductor.

    Integrated Dynamics Engineering was founded in Flörsheim, Germany, in 1990. Now, IDE resides at its now headquarters complex in Raunheim, Germany, which was opened for use in 2014 with additional extensions are being opened in the summer of 2015.

    Since 2008, IDE is part of Aalberts Industries N.V. in Langbroek, The Netherlands. Aalberts Industries has more than 14,300 employees, in some 30 countries, with markets ranging from semiconductors and aerospace to the oil, gas automotive and industrial sectors, among others.

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