Particle Measuring Systems, Inc.

5475 Airport Blvd.
Boulder,  CO  80301-2339

United States
  • Booth: 5686

Welcome to Particle Measuring Systems at SEMICON West 2017!

Particle Measuring Systems Inc. (PMS), a subsidiary of Spectris plc, is a global technology leader in contamination monitoring, the inventor of laser particle counting, and now is the leading provider of solutions for monitoring and controlling many forms of contamination that impact companies that manufacture in ultra-clean environments.  


  • Nano-ID® NPC10 Aerosol Particle Counter
    First Condensation Particle Counter specifically developed for ultra-clean production environments....

  • Specifically developed for ultra-clean manufacturing environments. This instrument combines 10 nm sensitivity with high sample flow rate and the lowest zero count specification on the market. Provides single-particle-detection for the cleanest manufacturing and testing applications.

    Designed for plug-and-play operation, the unit is ready to sample aerosol particles in minutes. Set up is simply applying power and connecting the input and output sample lines. All of the user-selectable variables are configured through the touchscreen display. The color display provides graphical trending of particle contamination. Data is automatically saved to the onboard memory and can be exported via ModBus TCP/IP or USB port.

    The proprietary non-hazardous working fluid is superior to isopropyl alcohol, n-butyl alcohol, and water-based condensation particle counters. The fluid provides long use between refills, no odors, and a sample reservoir that captures and recycles most of the working fluid. 

  • Chem 20™ Chemical Particle Counter
    20 nm sensitivity, the world’s most sensitive particle sensor for high purity process chemicals....

  • Leading-edge microelectronic processes require very clean process chemicals that are highly filtered and regulated to a particle size of 20 nm or below. With 20 nm particle sensitivity, the new Chem 20 Chemical Particle Counter is the world’s most sensitive particle sensor for high purity process chemicals.

    Extensive data on chemical distribution and packaging systems proves that the Chem 20 sensor, with 20 nm sensitivity, detects larger concentrations of particles with better statistics than competitive products. The Chem 20 Chemical Particle Counter is a valuable tool that enables facility, process and yield process engineers to quickly detect and characterize chemical particle sources before they impact process and device performance.

  • Ultra DI® 20 Liquid Particle Counter
    Designed and optimized for >20nm particle monitoring of advanced ultrapure water systems....

  • The Ultra DI 20 is the industry’s first 20 nm (PSLs) and 9 nm (metals) sensitivity liquid particle counter. This new instrument is equipped with advanced laser and detector technologies in order to collect sufficient scattered light from these extremely small particles. The Ultra DI 20 is designed to operate continuously, providing stable realtime data, with reduced water consumption so that it may be applied inside process equipment areas with restricted flow capacity. This is an ideal solution to enable continuous particle monitoring of a UPW system for modern semiconductor, flash, storage, LED, MEMs manufacturing, and their suppliers.

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