Cast Aluminum Solutions (CAS), a leader in designing & manufacturing highly-engineered thermal components for the semiconductor industry, is proud to announce the release of PUR-X Circulation Heaters.
PUR-X Heaters feature a replaceable PFA flow-tube. The resilient high-purity PFA (Teflon®) tube material stands-up to many of the caustic solvents involved in wafer processing. In the event of contamination, PUR-X’s flexible tube can be field-replaced in as little as 15 minutes, without the need for a service call.
PUR-X Heaters have been design to work in conjunction with wet bench applications, such as solvent and DI water heating, but these heaters are also well-suited for heating high-purity gases (nitrogen, argon, purified air) for processes such as wafer drying.
PUR-X Heaters also have a special “isolated flow-path feature”: heated media is isolated in the PFA flow-tube, never touching the heating element, or any other component within the heater. This is a critical contamination prevention feature. Adding to the heater’s safety rating, explosion proof (NEMA 7) terminal enclosures are available. Up to three thermocouples may be installed to monitor operational temperature. To protect the heater’s aluminum body from caustic chemicals and pitting, Teflon coatings are available.
PUR-X is available in two sizes: PUR-X 1000 and PUR-X 2000. Both units are available in multiple worldwide voltages. The PUR-X 1000 model has a maximum power output of 4.5 kW, and PUR-X 2000 has a range to 7.9 kW.
Tony Meadors, Vice President of Semiconductor Industry Sales at CAS, explained “PUR-X fits processes where media must remain contamination-free. This includes ultra-pure heating of DI water and photo-resist removal solvents, but because PUR-X can also heat gases, it fits with drying applications that use heated nitrogen.”
Cast Aluminum Solutions offers a range of heated products to the semiconductor industry, including pedestal heaters, custom-geometry chamber heaters, and a wide selection of circulation heaters. The PUR-X design is an augmentation of CAS’s well-respected CAST-X circulation heater design.
PUR-X circulation heaters are available worldwide, purchased through CAS’s team of application engineers and distributors located throughout the America’s, Europe and Asia.
Please visit Cast Aluminum Solutions at Booth # 304 in Moscone’s South Hall during Semicon West 2018.
CAS is located near Chicago and serves customers worldwide through our network of application engineers in Silicon Valley and offices in North America, Europe, and Asia. Visit www.castaluminumsolutions.com
For further information regarding Cast Aluminum Solutions (CAS) or PUR-X Circulation Heaters, please contact
Jeffrey Awe, Marketing Director at Cast Aluminum Solutions.
Marketing Director, Cast Aluminum Solutions
Batavia, Illinois – USA