SUNNYVALE, CA July 2nd, 2018 – HORIBA Semiconductor, global leader in Process Metrology and Control Components, announces the introduction of the EV 2.0 End Point Monitor.
EV 2.0 is a configurable, high performance spectrograph that can be customized for a variety of OEM/End-user applications including but not limited to ALD/ALE, dry etch, plasma cleaning, and deposition processes. The spectrograph can be used for enhanced process control, stability / drift monitoring, and endpoint detection.
With its proprietary high resolution holographic spectrograph equipped with a 2048x16 pixels Back-Thinned CCD and fast, 16 bit acquisition electronics, the EV 2.0 is capable of acquiring plasma light emission with optimised signal to noise ratio from 200 to 1050 nm. Exposure time varies from 20 ms to 2.5s depending on the intensity of the plasma.
“The EV 2.0 is a successor to HORIBA’s EV 140 and includes a host of new features and capabilities. In particular, the new spectrograph includes easy-to-use software that not only provides continuous process monitoring, but it can also be used to create customized process recipes. This extension of the EV 140 series shows how HORIBA continues to invest in research and development that drives solutions for process problems” said Paul Totten, Segment Marcom Leader at HORIBA Semiconductor.
HORIBA technologies for process monitoring are used globally in applications that demand the highest performance. The EV 2.0 represents an innovative development that caters to specific customers’ process performance needs. The creation of the supporting software indicates HORIBA’s commitment to enhanced packaging of our solutions in a way that allows our customers to easily install, integrate, and operate them. To see a live model of our spectrograph, visit us at booth number 517 at Semicon West 2018 in San Francisco.
HORIBA is a world leader in the measurement and control of critical process chemistries and our instruments are found in equipment and facilities worldwide. The HORIBA Semiconductor segment provides an extensive array of instruments and solutions for applications across a broad range of Semiconductor processes and in the United States is represented by HORIBA Instruments Inc.
Segment Marcom Leader
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