The JEOL InfiTOF compact high-resolution gas analysis mass spectrometer is ideal for monitoring trace impurities in semiconductor process gases, evolved gases from catalytic reactions, vapor epitaxy and more. No larger than a desktop PC, the InfiTOF instantly and identifies isobaric gases such as CO/N2,/B2H6, Ar/C3H4, Ne/HF, CO2/N2O/C2H4O, or PF3/CF4 for continuous monitoring without chromatography. “
This Time-of-Flight Mass Spectrometer uses Multi-turn and Perfect focusing technologies to achieve high mass-resolving power in a very compact package.
Designed for real time monitoring of directly introduced gas, this high mass-resolution mass spectrometer features stability for real time gas monitoring and elemental composition determination through accurate mass measurement.
Applications include analysis of gases used in semiconductor processing, vapor epitaxy and real-time monitoring of gases relevant to catalytic processes, battery technology and advanced materials.