Gripping Power, Inc.

11930 44th Street North
Clearwater,  FL  33762

United States
https://www.grippingpower.com/
  • Booth: 322

Since 2002, Gripping Power has produced electrostatic chuck power supplies which are fully-programmable, bipolar, isolated and tightly regulated. They are compatible with monopole and bipolar Coulombic and Johnsen-Rahbek electrostatic chucks and have proven reliability in applications such as RIE, ICP, PECVD and EUV lithography. They can support 150mm, 200mm and 300mm semiconductor wafer production and 450mm process development. 

High voltage cable assemblies, RF traps and OEM specific packaging options are also available.

We can also provide electronic circuit design, PCB assembly, cable harness fabrication, aluminum and steel enclosure fabrication and complete industrial PC-based automation systems for semiconductor process industry applications via our associated vendors.

You are invited to learn more about how the new GPA, GPE and GPX line of electrostatic chuck power supplies can improve process throughput and reduce capital costs by visiting Gripping Power, Inc. in the South Hall at Booth 322.

www.grippingpower.com
sales@grippingpower.com
+1 (727) 572-4100


 Press Releases

  • CLEARWATER, FL July 9, 2018  – Gripping Power, Inc., a leading manufacturer of high voltage power systems for the semiconductor fabrication industry, will introduce the new GPA, GPE and GPX line of electrostatic chuck (ESC) power supplies at SEMICON West, held July 10-12, 2018 in San Francisco, California.

    The GPX and GPE series are bipolar, fully-programmable, electrostatic chuck power supplies for 200mm, 300mm and 450mm semiconductor wafer processing. They feature a high-power output capability of up to ±6kVDC at 50W and an efficient switch-mode topology which runs cool without forced air. The GPX and GPE power supplies can operate fully-floating, ground referenced or biased and provide over 8kVDC of galvanic isolation when floating. The output is safety interlocked via a GES MCS series, six-pin high voltage connector. 

    The GPE series provides the same high performance features of the GPX series but in a compact embedded enclosure. Valuable instrument rack space can be saved, as these units can be located near the radio frequency (RF) enclosure, eliminating the need for lengthy high-voltage cables from rack mounted power supplies. 

    The GPA series are low-cost, regulated, high-voltage power supplies which are available configured as entry-level electrostatic chuck power supplies, general purpose bipolar power supplies or unipolar bias power supplies. They are available with output power levels of up to ±3kVDC at 25W.

    The GPX and the GPA series both feature easy-to-read OLED displays. These units can be controlled by the front panel user interface, analog and digital I/O or via the USB interface. EtherCAT and Modbus TCP/IP network interfaces are optionally available on both the GPX and GPE units.

    For more information visit Gripping Power at booth 322 at SEMICON West 2018.

    About Gripping Power

    Gripping Power, Inc. (GPI) is a privately-held company, based in Clearwater, Florida, that manufactures application specific, high voltage power systems and accessories for demanding applications in the semiconductor fabrication industry. Since 2002, GPI has produced programmable electrostatic chuck power supplies which have been employed by academic organizations and leading companies around the world involved in the research and manufacture of advanced semiconductor devices. GPI also produces high voltage cable assemblies and RF filters.

    Media Contact:

    Lauren Scott
    Gripping Power, Inc.
    11930 44th St North
    Clearwater, FL USA
    727.572.4100
    media@grippingpower.com

    ###


 Products

  • GPX Series Electrostatic Chuck Power Supplies
    GPX series are bipolar, floating, high-power, fully-programmable, electrostatic chuck power supplies....

  • The GPX series are bipolar, floating, high-power, fully-programmable, electrostatic chuck power supplies for 200mm, 300mm and 450mm semiconductor wafer processing. They are compatible with Coulombic and Johnsen-Rahbek electrostatic chucks in applications such as RIE, ICP, PECVD and EUV lithography.

    Features
    • High-power capability for driving large-area Johnsen-Rahbek electrostatic chucks
    • Efficient switch-mode topology runs cool without forced air
    • Output can be fully-floating, ground referenced or biased
    • Voltage output follows user defined chuck and dechuck algorithms
    • Up to eight different chuck and dechuck programs can be edited and stored for process flexibility
    • Declamp waveform frequencies of up to 10 cycles per second
    • Operation can be controlled via analog and digital I/O, the USB interface interface or through an optional EtherCAT interface.
    • Wafer sensor adapts to various chuck sizes and RF delivery systems
    • Small size conserves instrument rack space


    Electrical
    GPX series power supplies can be factory configured to operate from 24VDC or 100-240 VAC 50/60Hz.

    Mechanical
    Dimensions: 82.5mm (H) x 210.0mm (W) x 300mm (D), 2U rack enclosure
    Panel Width: 241.3 mm (half-rack)


    GPX600 – 0 to ±6.0kV, 50W (8.5mA continuous) ESC power supply
    GPX300 – 0 to ±3.0kV, 25W (8.5mA continuous) ESC power supply
    GPX150 – 0 to ±1.5kV, 12W (8.5mA continuous) ESC power supply


    *Available Q3 2018

  • GPA Series High Voltage Power Supplies
    GPA Series are low-cost, regulated, high-voltage power supplies...

  • The GPA Series are low-cost, regulated, high-voltage power supplies which are available configured as entry-level electrostatic chuck power supplies, general purpose bipolar power supplies or unipolar bias power supplies.

    Features
    • Modest-power capability for driving 200mm or 300mm Coulombic or Johnsen-Rahbek electrostatic chucks
    • Operation can be controlled via analog and digital I/O or the USB interface interface
    • Compact in size and can be mounted in any orientation

    Electrical
    All GPA series power supplies are factory configured to operate from 24VDC.

    Mechanical
    Dimensions: 41.2mm (H) x 210.3mm (W) x 300mm (D), 2U rack enclosure
    Panel Width: 241.3 mm (half-rack)

    GPA Series Electrostatic Chuck Power Supplies*
    GPA Series E variant power supplies feature a floating, reversible high voltage output on two MHV connectors and are optimized for electrostatic chuck applications.
    GPA300E – 0 to ±3.0kV, 25W fully floating, electrostatic chuck power supply with reversible polarity.
    GPA150E – 0 to ±1.5kV, 12W fully floating, electrostatic chuck power supply with reversible polarity.

    GPA Series Floating High Voltage Power Supplies*
    GPA Series F variant power supplies feature a floating, reversible high voltage output on two MHV connectors.
    GPA300F – 0 to ±3.0kV, 25W fully floating, high voltage power supply with reversible polarity.
    GPA150F – 0 to ±1.5kV, 12W fully floating, high voltage power supply reversible polarity.

    GPA Series Bipolar Power Supplies*
    GPA Series B variant power supplies feature a ground referenced high voltage output via a single MHV connector.
    GPA300B – 0 to ±3.0kV, 25W high voltage power supply with reversible polarity.
    GPA150B – 0 to ±1.5kV, 12W high voltage power supply with reversible polarity.


    GPA Series Unipolar Power Supplies*
    GPA Series U variant power supplies feature a single, ground referenced high voltage output via a single MHV connector. 
    GPA300U – 0 to 3.0kV, 25W unipolar, high voltage power supply
    GPA150U – 0 to 1.5kV, 12W unipolar, high voltage power supply

    GPA Series U variant power supplies are factory configured for negative or positive output. Specify P or N suffix when ordering.

    *Available Q3 2018

  • GPE Series Electrostatic Chuck Power Supplies
    GPE series are bipolar, floating, fully-programmable, electrostatic chuck power supplies in a compact, embedded enclosure....

  • The GPE series are bipolar, floating, fully-programmable, electrostatic chuck (ESC) power supplies in a compact, embedded enclosure. They are compatible with Coulombic and Johnsen-Rahbek electrostatic chucks in applications such as RIE, ICP, PECVD and EUV lithography.

    Features
    • High-power capability for driving Coulombic or Johnsen-Rahbek electrostatic chucks
    • Output can be fully-floating, ground referenced or biased
    • Voltage output follows user defined chuck and dechuck algorithms
    • Up to eight different chuck and dechuck programs can be edited and stored for process flexibility
    • Declamp waveform frequencies of up to 10 cycles per second
    • Operation can be controlled via analog and digital I/O, the USB interface interface or through an optional EtherCAT interface.
    • Wafer sensor adapts to various chuck sizes and RF delivery systems
    • Compact in size and can be mounted in any orientation


    Electrical
    GPS series power supplies are factory configured to operate from 24VDC. (1.5A max)


    Mechanical
    Dimensions: 75mm (H) x 210mm (W) x 254mm (L)


    GPE600 – 0 to ±6.0kV, 50W (8.5mA continuous) ESC power supply
    GPE300 – 0 to ±3.0kV, 25W (8.5mA continuous) ESC power supply
    GPE150 – 0 to ±1.5kV, 12W (8.5mA continuous) ESC power supply


    *Available Q3 2018


 Additional Info

New Exhibitor:
Yes
New Products:
Yes
Displaying Equipment:
Yes
Product Demonstrations:
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Please indicate which industries/technologies your company serves
LED/solid state lighting, MEMS, Photovoltaic, Power Semiconductors, Semiconductor

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