10351 Olympic Dr
Dallas,  TX  75220-4437

United States
  • Booth: 1272

KFPI specializes in semiconductor fire safety solutions for semiconductor equipment and processes on a global basis.  KFPI provides complete fire safety systems including design, consulting, integration, equipment, installation, certification, & training. In addition to the compliance guarantee with SEMI S2, FM, & NFPA, KFPI focuses on equally critical items such as system reliability, performance, and longevity. KFPI experience is shown throughout our active involvement in leadership in all related semiconductor standards development committees. KFPI is a global leader with offices throughout the USA, Taiwan, Japan, China, Korea, & Europe. 

KFPI is also introducing LCAS, the only fire safety system that mitigates the risk of fire, damage, contamination, and downtime from leaks of metal organic (MO) [pyrophoric] chemistries.  LCAS is an “add-on” system for MO bulk delivery systems that provides containment and abatement of any size leak without exposure to fabs or personnel.


  • LCAS - Leak Containment & Abatement System
    The KFPI LCAS system is an ADD-ON safety control system for metal organic bulk chemical delivery systems. LCAS is a self-contained safety control system which can be attached to an LCAS-compatible MO bulk chemical delivery system or to MO tool gas boxes....

  • The LCAS can safely monitor and control the BCDS environment. In the event of a liquid or vapor leak of metal organic chemistry inside of the BCDS, the LCAS safely contains and abates the leak, without fire, damage, or particle exposure to the fab – resulting in minimal disruption to production.


    All Leaks are Contained and Controlled

    All Leaks are Safely Abated

    Isolates MO from O2 Incompatibilities

    Integrated Safety Controls, Detection, & Interlocks

    SEMI S2 Compliant

    SEMI Doc 5761A Compliant

    No Flame

    No Fire Damage

    Incipient Particles Inside

    No Particles Outside

    No Risk Bleve

    ERT Safety Interlock

    No Secondary Containment

    Small Footprint/Cost

    MO Vapor Controlled & Abated

    Minimal Downtime

    Minimal Disruption

    Wipe, Reset, & Restart


    Sealed Cabinet

    Controls Cabinet Environment

    Liquid Collection Sump

    High-Sensitivity Smoke Detection

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LED/solid state lighting, MEMS, Photovoltaic, Plastic/organic/flexible electronics, Power Semiconductors, Semiconductor, Flexible and Printed Electronics-, Sensors

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