Application SLT 3000:
Lift and move heavy, sensitive or expensive parts, modules or subassemblies in metrology / lithography / process equipments, for vacuum and atmospheric applications in service cases. Also available for smaller payload versions down to 30 kg.
Specification SLT 3000:
Operation Vertical and horizontal movement
Application Metrology / lithography / process equimpents, vacuum and atmospheric
Payload up to 6.000 kg
Payload Dimensions up to 3.960 mm x 3.960 mm (X x Y, scalable)
Vertical motion range 260 mm
Horizontal motion range 2.700 mm
Vibration level (for payload) < 0,05 m/s2 RMS (@1Hz … 100Hz)
Cleanliness ISO Class 1 (according ISO 14644-1, no organic contamination)
Operation Pushbutton control
Power supply 230 VAC, 3Ph+N+PE
Power consumption max 6kVA
Norms & Certifications 2004/42/EG, 2004/108/EC
EN ISO 12100:2011, EN 6024-32:2008 (Safety of hoisting machines)
EN13001-1:2004 + A1:2009/AC:2009 (Cranes design)
SEMI S2-0712a