The Applied iSystem Controller is an easy-to-install, small-footprint controller that synchronizes critical subfab components with process tool operation on both 200mm and 300mm process tools. The system continuously monitors the tool at a chamber level to differentiate between individual process, clean, and idle states, and then adjusts subfab utilities usage to match the operational status of the tool.
When wafers are not in production and clean cycles are not running, the eco-efficient iSystem Controller places subfab equipment such as vacuum pumps and abatement systems into a standby mode. The standby state uses less electrical power, fuel gas, nitrogen, oxygen and fresh water while generating less waste water. In addition to lower utility usage, NOx and various greenhouse gas emissions are reduced by minimizing the volume of fuel and purge gases used.
The iSystem Controller has no impact on chamber performance while triggering the required pump and abatement states from the chamber operating conditions. It synchronizes abatement operating states to ensure that the targeted process gasses are abated when switching between chamber process, clean and idle states. The iSystem Controller provides a fail-safe design and will return subfab components to their normal operating modes in the event of an iSystem Controller power loss, CPU lock up, cable disconnect, or other communication failure.
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