Applied Materials

1140 East Arques Avenue
Sunnyvale,  CA  94085

United States
https://www.appliedmaterials.com
  • Booth: 1260

Applied Materials, Inc. is the leader in materials engineering solutions used to produce virtually every new chip and advanced display in the world. Our expertise in modifying materials at atomic levels and on an industrial scale enables customers to transform possibilities into reality. At Applied Materials, our innovations make possible the technology shaping the future. Learn more at www.appliedmaterials.com.


 Products

  • Applied Materials Aeris™-Si
    The new Aeris-Si is an integrated solution for subfab foreline cleaning to manage silica load and improve pump lifetime....

  • The new Aeris-Si is an integrated solution for subfab foreline cleaning to manage silica load and improve pump lifetime. The Aeris-Si zero-footprint control system integrates deposition process solutions for subfab foreline cleaning by managing silica load. The system enables a high flow tetraethyl orthosilicate (TEOS) process (18G/min/side) for the highest deposition rate and throughput while extending pump lifetime to over 12 months, resulting in a return on investment (ROI) of less than 8 months. The subfab solution is SEMI standard S2 certified.

    The Aeris-Si process collects SiO2 powder prior to the pump inlet. By using NF3 plasma technology, the system converts the powder to a pump-friendly SiF4 gas. This prevents the build-up of solids inside the pump resulting in over a 7% uptime improvement and ensures sufficient cooling before pumping. The system has no impact on wafer qualification data due to foreline plasma during cleans, and all process parameters operate within normal range. The pre-pump system easily fits into existing exhaust lines requiring only power and clean gas connections.

    The Aeris-Si reduces levels of flammable, explosive, or toxic exhaust gases and potentially hazardous reactive solids downstream of the process chamber in an efficient, cost-effective, and space-saving solution for deposition processing.

    Contact:

    Llewellyn Edmunds,

    Strategic Marketing Director

    Llew_Vaughan-Edmunds@amat.com
  • Applied Materials iSystem™ Controller
    The Applied iSystem Controller is an easy-to-install, small-footprint controller that synchronizes critical subfab components with process tool operation on both 200mm and 300mm process tools....

  • The Applied iSystem Controller is an easy-to-install, small-footprint controller that synchronizes critical subfab components with process tool operation on both 200mm and 300mm process tools.  The system continuously monitors the tool at a chamber level to differentiate between individual process, clean, and idle states, and then adjusts subfab utilities usage to match the operational status of the tool.

    When wafers are not in production and clean cycles are not running, the eco-efficient iSystem Controller places subfab equipment such as vacuum pumps and abatement systems into a standby mode. The standby state uses less electrical power, fuel gas, nitrogen, oxygen and fresh water while generating less waste water. In addition to lower utility usage, NOx and various greenhouse gas emissions are reduced by minimizing the volume of fuel and purge gases used.

    The iSystem Controller has no impact on chamber performance while triggering the required pump and abatement states from the chamber operating conditions. It synchronizes abatement operating states to ensure that the targeted process gasses are abated when switching between chamber process, clean and idle states. The iSystem Controller provides a fail-safe design and will return subfab components to their normal operating modes in the event of an iSystem Controller power loss, CPU lock up, cable disconnect, or other communication failure.

    Contact:

    Llewellyn Edmunds,

    Strategic Marketing Director

    Llew_Vaughan-Edmunds@amat.com


 Additional Info

New Exhibitor:
No
New Products:
Yes
Displaying Equipment:
Yes
Product Demonstrations:
Yes
Please indicate which industries/technologies your company serves
MEMS, Power Semiconductors, Semiconductor, Sensors

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