Fabmatics GmbH

8410 South 700 East, Suite 100
Sandy,  UT  84070

United States
  • Booth: 1451

Material Handling Automation for Semiconductor Factories

Fabmatics is an experienced specialist for the automation of material flows and handling processes in semiconductor manufacturing plants, semiconductor process equipments and other high-tech production environments. The company has been implementing automation projects with great success for more than 25 years.

Fabmatics is in a unique position to offer its customers comprehensive solutions in the field of material flow automation from a single source. The service portfolio includes a modular product range of hardware and software for the automation of handling, transport and storage processes as well as solutions for product identification and localization. The offer is supplemented by consulting and development services from the company’s own R & D department in order to provide customized solutions with the highest degree of individualization depth and functional reliability.

Fabmatics does business around the world and currently has some 210 employees at its headquarters in Dresden, Germany and its US subsidiary in Sandy, Utah.


  • RFID Systems
    Our customer-specific RFID Systems for the identification of batches always ensure a transparent material flow in your cleanroom production and convince with a best price-performance ratio....

  • In order to quickly and easily identify materials in the production process, we offer customer-specific RFID systems in various frequency ranges. These are especially designed for use in cleanrooms, are able to be integrated smoothly at various points, and they support established interface standards.

    Our current product portfolio includes LF and HF RFID readers, matching accessories like antennas and various RFID based logistic products, e.g. RFID trolley, RFID racks, Load/Unload Stations for OHTs.

    A seamless, 100 per cent identification of products forms the necessary basis for any intralogistics automation. For this reason, we also offer solutions for retrofitting factories with RFID identification systems. For this, existing wafer cassettes will be retrofitted with RFID tags, and required identification positions (e.g. load ports) will be equipped with RFID readers.

    You can be sure that our RFID solutions are matched exactly to your individual production requirements.

    Link to Fabmatics RFID Products

  • SCOUT - Autonomous Navigating Mobile Robot
    Our mobile robots SCOUT combine an established, autonomous navigating vehicle with different types of handling units to realize various transportation and handling tasks in semiconductor fabs....

  • The mobile robot SCOUT navigates autonomously and does not require any kind of guidance system on the floor or on the ceiling. Its compact size and extreme agility make it very flexible, and thanks to its reliable sensor technology, it can even be used safely in areas where people and machines work very closely together. It may also be adjusted at any time to suit the production environment without construction procedures. The transport jobs of several vehicles in the same bay or area are coordinated by the Fabmatics Fleet Manager (HSFM).

    Key Features:

    • Modular design enables scaling in terms of size, payload and handling unit
    • 3D sensor technology ensures the recognition and bypassing of obstacles
    • Proven cleanroom suitability up to ISO class 3/US FED class 1
    • Charging on-the-fly during handling enables 24/7 operation
    • Short commissioning times at customer site and low adaptation effort to changes in the production environment

    SCOUT versions:

    • SCOUTactive - 6-axis handler
    • SCOUTroro - roll-on roll-off handler
    • SCOUTtriax - triple linear axis handler
    • SCOUTsubstrate - passive transporter for large glass substrates
    • SCOUTcargo - passive transporter for various boxes

    Link to SCOUT Website

    Also have a look at our mobile robot HERO FAB for FOUP and SMIF Pod Handling!

    Link to HERO FAB Website

  • FlatStocker for Zero Footprint Storage
    The FlatStocker by Fabmatics is an innovative system to store wafer cassettes, boxes and other material carriers underneath the cleanroom ceiling....

  • Due to the fact that clean room floor space in semiconductor factories is limited and expensive, Fabmatics developed an innovative stocker concept that saves the floor space for process machines by storing the WIP underneath the clean room ceiling. The FlatStocker is installed directly above the process machines or the corridors of interbay and intrabay of the factory.

    The system can be designed for different material carriers, e.g. HA-200 boxes, open cassettes or SMIF pods. The connection to a transport system (e.g. conveyor), combined with vertical lifts to the machine level, enables fast lot access at any time. Equipped with ID technology (e.g. RFID, barcode), the FlatStocker reports the material ID information to the host system (MCS/MES).


    • Freely scalable and also expandable at a later date

    • Flexible positioning of lifts (input/output stations) and conveyor connections

    • Easy disassembly of the safety bottom shields to enable move-in/out of tall machines

    Link to FlatStocker Website

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