Impedans

Chase House City Junction Business Park
Northern Cross
Dublin,  Leinster  Dublin 17

Ireland
https://impedans.com/
  • Booth: 6470


Welcome to the RF and Plasma Diagnostic Specialists

Impedans specializes in the delivery of high performance and high-resolution plasma diagnostics solutions to customers in research and industry.

Plasma processing is more prevalent today than ever, and low and medium pressure plasmas are used in the treatment and manufacture of a wide range of materials and components from cutting tools to integrated circuits to solar panels.

Our products find applications in plasma process research and development, process monitoring and control, and manufacturing tool development in the semiconductor, surface coating, flat panel, thin film, and solar sectors.

Impedans' products represent the next generation in plasma diagnostics technology and coupled with our in-depth plasma knowledge and years of experience, our customers can be sure that they can fully characterize, optimize and monitor their plasma process with confidence.


 Products

  • Alfven 100 | RF Event Detector
    The Alfven 100| (RF) event detector monitors events such as arcs, ignition phenomena and instabilities, in plasma and other RF processes, with 1 μs resolution. It detects events in both the voltage and current signals....

  • Overview

    The Alfven | 100TM design consist of a coaxial, through line, structure with 50 ohm characteristic impedance. It is designed for installation in the pre-match location of RF processes. Typical applications are found in RF plasma processing including etching, physical vapour deposition (PVD) and plasma enhanced chemical vapour deposition (PECVD). Deposition processes are particularly susceptible to arcing and other short timescale events.
    ​​​​​​​

    Benefits

    Connects pre-match, in series with the power supply transmission line with standard connectors.
    Detects process events through the matching unit, no need for complicated retro-fit in the match unit output.
    Equipped with all the main digital communications protocols for ease of integration with existing equipment software management systems.
    Only records 
    high-resolution data around actual events, reducing the amount of data that has to be handled.
    Works for continuous-wave (CW), frequency-tuning and pulsed RF processes.

    Features

    * 50-ohm characteristic impedance, designed for pre-match installation
    * RF voltage and current event detection with 1 µs time resolution
    * Events recorded through a 5 ms window
    * User configurable event classification interface
    * Event record, event count and VI data provided
    * Yearly, monthly, weekly, daily event data managed seamlessly using our proprietary 
      application software

    Applications

    • Arc detection
    • Real-time pulse monitoring
    • Process Instabilities
    • Missing RF pulses

    For further details and specifications on the Alfven 100, download our datasheet 

  • Octiv Mono RF Wattmeter
    The Octiv Mono is a through-line RF Wattmeter, directional power sensor, and impedance analyzer. It measures a single fundamental frequency and it has a NIST traceable full-scale accuracy of 1%. It connects directly to a PC via USB over the network. ...

  • Overview

    The Octiv Mono is a precision RF Wattmeter used in a large number of laboratory applications. The Octiv Mono operates to 1% true accuracy and is immune to harmonics making it the most trusted power sensor for applications such as semiconductor manufacturing. 

    Calibrated to five fundamental frequencies of your choice, for example:

    * 2MHz
    * 13.56MHz
    * 21.12MHz
    * 40.68MHz
    * 60MHz

    Benefits

    The Octiv Poly Sensors calibration is NIST traceable and is carried out in our ISO 17025 accredited lab in Dublin. The calibration incorporates intense averaging and statistics to ensure the repeatability and accuracy of each sensor is guaranteed. Our highly trained staff are dedicated to providing consistent quality to our customers.

    Features

    * Interchangeable Connectors
    * Wide Power Range
    * Multiple Frequency Calibration
    *  Pulsed RF Functionality

    Applications

    * RF Subsystem Health Indexing
    * Match Network Characterization
    * Generator Output Verification
    * Transmission Line Mis-Match Identification

    For more details download the Octiv Mono Datasheet here

  • Industrial Octiv VI Probe
    The Industrial Octiv VI Probe is a multi-frequency in-line RF voltage, current and phase measurement system with network communication (Ethernet Web Service Protocol, EtherNet/IP or EtherCAT available)....

  • Overview

    The Industrial Octiv VI Probe is a precision power and impedance sensor which normally sits post-match unit. It is used to measure the load impedance in applications such as plasma processes. It monitors voltage, current and phase of multiple fundamental frequencies and their harmonics. The Octiv Poly VI Probe is ideal for accurately monitoring dual frequency and triple frequency plasma systems.

    The Industrial Octiv helps solve issues related to poor production yields, rf tool matching; fault detection, rf fingerprinting and classification. The RF parameters are strongly correlated with plasma parameters. The Industrial Octiv VI Probe provides a wide range of parameters suitable for use in multivariate analysis in endpoint applications development. The sensor allows you to indirectly measure plasma parameters helping you to understand and control the process. It helps to define exact process windows and determines the health of power subsystems. The Octiv Poly helps determine process run to run stability. It gives you the confidence and insight to measure the power delivery parameters and map the plasma state.

    Benefits

    The Octiv Poly Sensors calibration is NIST traceable and is carried out in our ISO 17025 accredited lab in Dublin. The calibration incorporates intense averaging and statistics to ensure the repeatability and accuracy of each sensor is guaranteed. Our highly trained staff are dedicated to providing consistent quality to our customers.

    Features

    * Fully Customizable Form Factor
    * Process Tool Integration
    * Ethernet Enabled
    * Industrial Communication Protocols

    Applications

    * Process Diagnostic Monitoring
    * Real-Time Feedback
    * Integrated With Factory Servers
    * High Reliability Using Industrial Protocols

    For further information please download the Industrial Octiv Datasheet


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