Stanford Research Systems

1290-D Reamwood Ave.
Sunnyvale,  CA  94089

United States
  • Booth: 6159

Stanford Research Systems designs and manufactures scientific and engineering instruments, including Binary Gas Analyzer, Residual Gas Analyzers, Process Monitoring Systems, Ion Gauge Controller, and many more.

 Press Releases

  • 1) E84 PIO Sensor

    E84 Sensor(PIO : Parallel Input/Output) is required for product configuration AMHS (Automatic Material Handling System) for semiconductor and LCD factories. Vehicle with (AGV / OHT) and a device to send and receive Input / Output signals between equipment in a non-contact, So that noise can operate reliably in many factories of various environmental technologies and know-how -intensive high-tech products.

    2) E84 PIO Specification 


    SEMI-E84 and E23 wireless communication that supports a communication protocol.


    Configuration that incorporates the world ‘s first RF communication IR communication function and product line


    Excellent reliability which stably acts even in the ambient noise


    It provides tools to easily analyze the cause of the error Load / Unload that occur during work


    All kinds of solutions provided from the development of device to the operation of line


    Acquisition of certifications such as FCC, CE, SRRC and KC

    3) Technologies 


     High performance DSP applied technology


     ARM process applied technology


     Real time video/audio processing technology


     RFID reader design technology (125kHz) 


     CMOS/CCD camera applied technology


     USB2.0 device applied technology


     Sensor technologies using IR and laser diode


     Network applied technology


     Robot and motor controlled technology


     Motion control technology


     Low noise analogue circuit design technology


     FPGA and EPLD design technology


     PCB design technology: high speed, low noise, EMI prevention, etc.


     2-dimensional code related technologies (QR, PDF417, Data Matrix and its own code)


     Low cost product design technology


     High quality and high reliability product design technology


  • Residual Gas Analyzer
    SRS RGAs provides gas analysis up to 300 amu with 6 orders of magnitude dynamic range and 5 x 10-14 Torr detection limit. An Windows based software package allows real-time data acquisition, analysis and control....

  • The 100, 200 and 300 amu residual gas analyzers from SRS offer exceptional performance and value. These RGAs provide detailed gas analysis of vacuum systems at about half the price of competitive models. Each RGA system comes complete with a quadrupole probe, electronics control unit (ECU), and a real-time Windows software package that is used for data acquisition and analysis, as well as probe control.

    • 100, 200 and 300 amu systems
    • Better than 1 amu resolution
    • 6 decades of dynamic range
    • 5 × 10−14 Torr detection limit
    • RGA Windows & LabVIEW software
    • Field-replaceable electron multiplier and filament
    • RS-232 and Ethernet interfaces

  • Ion Gauge Controller
    The IGC100 controller monitors pressure from Bayard-Alpert ion gauges, Pirani gauges, and capacitance manometers from 1000 Torr to UHV. It has a touchscreen display, analog I/O ports, 8 channels of process control (opt.), RS-232, GPIB and Web interfaces....

  • The IGC100 Ion Gauge Controller monitors pressure from up to two Bayard-Alpert ion gauges, two convection enhanced Pirani gauges and four capacitance manometers. It has many useful features that have never before been available in a single instrument. The IGC100 performs highly accurate, NIST traceable  pressure measurements, has a touchscreen display that can show pressure vs. time curves, comes with standard analog I/O ports and optional eight channel process control. The IGC100 is the first controller that is fully web-ready. Now you can access your vacuum system from anywhere in the world. The IGC100 has a standard RS-232 interface and an optional GPIB interface. 

    • 1000 Torr to UHV range
    • Highly accurate & stable
    • Pressure vs. time curves
    • 4 analog input/output ports
    • RS-232 interface
    • 8-channel process control
    • GPIB and Web interfaces
  • Binary Gas Analyzer
    The BGA244 / BGA244HP make gas concentration measurements on two gas mixtures for semiconductor processing including ALD, CVD, MOCVD and other gas concentration applications....

  • The internal gas table contains data on nearly 500 different compounds including process gases, dopants and precursor vapors. This enables measurements on over 50,000 different mixtures.

    Operating Range

    Concentration Range

    0 – 100%


    <140 to 7800 Torr


    -20 to 70 °C


    0 to >5 LPM

    Typical Measurement Accuracies

    Gas Mixture


    1% Diborane (B2H6) in Hydrogen


    1% Germane (GeH4) in Hydrogen


    1% Titanium Tetrachloride (TiCl4) in Argon


    1% TMI in Nitrogen


    10% Ozone (O3) in Oxygen


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MEMS, Semiconductor, Flexible and Printed Electronics-, Sensors

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