High purity fine ceramic element "Pure Beta" is a sintered body made of SiC (silicon carbide), which has high purity, excellent corrosion resistance, hardness next to diamond, and can withstand high temperatures of 1000 ° C or more. It has already used by many semiconductor manufacturing equipment manufacturers and device manufacturers as parts of various manufacturing equipment in semiconductor manufacturing processes.
Although silicon generally used until now as components of semiconductor manufacturing equipment have generally been disposable, the high purity fine ceramic element "Pure Beta" has the above-mentioned excellent characteristics. Therefore, it can be cleaned and used repeatedly and can be used for a long time. As a result, it is highly environmentally conducive to resource saving and contributes to cost reduction of the semiconductor manufacturing process.