MicroSense – A KLA Company

205 Industrial Avenue East
Lowell,  MA  01852

United States
  • Booth: 1543

MicroSense - Precision Wafer Measurement Systems

300mm MRAM Wafer Magnetic Metrology

MicroSense offers a full suite of MRAM magnetic metrology tools that characterize the magnetic properties of multi-layer 300 mm wafers used in the fabrication of Perpendicular STT-MRAM.

MicroSense UltraMap – The New Standard for 200mm Polished Wafer Flatness Measurement

The new MicroSense UMA-C200L wafer  metrology system measures the flatness, thickness and shape of  bare 200mm silicon wafers with industry leading throughtput, 32% higher than legacy systems. The UltraMap system provides -

  • Industry standard dual capacitance sensor measurement, with ultra-high data density for best measurement quality and repeatability for polished wafer Outgoing Quality Control.
  • Completely modern and supportable design for maximum reliability and ease of maintenance, now and in the future.

Thin Film Stress Measuremnt System - UMA-C200-STR

The MicroSense UltraMap UMA-C200-STR 200mm wafer measurement system provides full wafer maps of local stress for thin film despostion process control.

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Photovoltaic, Power Semiconductors, Semiconductor, Sensors

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