MTI Instruments Inc

325 Washington Ave EXT
Albany,  NY  12205

United States
  • Booth: 1650

MTI Instruments is a global leader in measurement solutions.

MTI Instruments is a US-based manufacturer of precision tools, systems and solutions for clients requiring the precise measurement and control of products and processes, and for the development and implementation of automated manufacturing, assembly, and complex machinery operation.

We offer manual and semi-automated metrology systems for solar and semiconductor industries. These capacitance-based systems, built around the company’s proprietary push/pull technology, provide non-contact measurement of thickness, TTV, and bow/warp. The Proforma 300i and the PV-1000 solar wafer measurement series are ideal for both process development and production environments. Our wafer metrology systems for semiconductors and photovoltaics find true bow & warp, thickness, flatness, TTV in a wide variety of substrate materials and thicknesses. Used by market leaders throughout industry, MTI tools have low cost of ownership, and are fast, reliable, and easy to use.


  • PV-1000 Wafer Metrology Systems
    The PV-1000 solar wafer measurement series are ideal for process and production environments. Each PV-1000 module provides up to 3 pairs of probes for measurement of max, min and average thickness and total thickness variation (TTV) and wafer bow....

  • Measurement module for in-process monitoring of solar/photovoltaic wafers. The PV-1000 solar wafer measurement series are ideal for both pro thickness variation (TTV) and wafer bow. For applications requiring additional thickness channels, multiple PV-1000 modules can be chained together for unlimited line scans on the wafer. Integrated data acquisition and control electronics analyze and transmit wafer data via the on-board Ethernet port at speeds of up to five wafers per second. The digital I/O port allows communication with wafer handling equipment for up to 64 classes of wafer sorting and binning.  Remote monitoring capabilities allow you to see your production line data across your network or directly at the module.
    • Up to three thickness channels per rack
    • Proprietary MTII push/pull capacitance probes work with all wafer types
    • Minimum, maximum, average and total thickness variation measurements
    • Bow measurement (3 probe pairs required)
    • Integrated data aquisition and control electronics
    • Fast Ethernet communications ports for production rates up to 5 wafers per second
    • Scalable for increased number of thickness line scans
    • Digital I/O for interface with existing wafer handling equipment
    • Windows® based control program for local or remote data monitoring
    • Windows® based DLL package for integration with existing control PC’s
    • Standard and custom probe sizes available
  • Proforma 300iSA
    The Proforma 300iSA is a desktop, semi-automated wafer measurement system for semi-conducting and semi-insulating materials. The Proforma 300iSA delivers full wafer surface scanning for thickness, thickness variation, bow, warp, site and global flatness....

  • The Proforma 300iSA is a benchtop/desktop, semi-automated wafer measurement system for semi-conducting and semi-insulating materials.  Based on MTII’s exclusive Push-Pull capacitance technology, the Proforma 300iSA delivers full wafer surface scanning for thickness, thickness variation, bow, warp, sori, site and global flatness. User-defined and ASTM/SEMI compliant scan patterns are used to generate full 3-dimensional (3D) wafer images.

    Customized data reports are available for viewing tabular data of each wafer measured with quick, easy export to your spreadsheet program.

    • Wafer Specifications Diameter:  150 mm, 200 mm, 300 mm
    • Material: All semiconducting and semi-insulating wafers including Si, GaAs, Ge, SiC, InP
    • Surfaces: As-Cut, Lapped, Etched, Polished, Patterned
    • Flat/Notch: All SEMI Standard Flat(s) or Notch
    • Conductivity: P or N Type
  • Proforma 300i Wafer Thickness Gage
    The Proforma 300i wafer thickness gage is a capacitance based, differential measurement system that performs non-contact thickness measurements of semiconducting and semi-insulating wafers....

  • Proforma 300i is a manual wafer measurement tool using MTI's proprietary non-contact capacitance probes. The Proforma 300i is fast, accurate and reliable. The Proforma 300i is capable of measuring wafer up to 300mm in diameter for thickness, total thickness variation (TTV) and bow.
    • Front USB port enables easy data storage to flash drives
    • MTI Instruments’ Proprietary Capacitance Circuitry for Outstanding Accuracy and Dependability
    • Non-contact Measurements
    • 76-300 mm Diameter Wafer Range
    • Optional wafer measurement rings
    • Wafer stops for exact centering
    • Ethernet interface
    • Full remote control software (Windows compatible)
    • Optional calibration wafers

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MEMS, Photovoltaic, Plastic/organic/flexible electronics, Power Semiconductors, Semiconductor, Sensors

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