Oxford Instruments America, Inc.

Suite 150 300 Baker Avenue
Concord,  MA  01742-2121

United States
https://plasma.oxinst.com/
  • Booth: 1439


Leading provider of etch and deposition process solutions

Oxford Instruments is a supplier of world-class plasma etch and deposition process solutions into the semiconductor market. Our systems are used by many of the world leading compound semiconductor companies, reliably producing thousands of high-performance devices day in day out.

Oxford Instruments’ experience in supplying process solutions to the production market worldwide has given us one of the strongest libraries of processes and capabilities in the world. With our knowledge, we are able to deliver the advanced, stable solutions you need to maximise your device performance.


 Press Releases

  • Oxford Instruments Plasma Technology (OIPT) has today launched a revolutionary plasma Atomic Layer Deposition (ALD) high volume manufacturing (HVM) solution delivering a step change needed to address fundamental challenges in the GaN power device industry. Gallium nitride devices are enabling the next generation of efficient power electronic devices for applications such as compact consumer power supplies, 5G networks, electric vehicles and renewable energy conversion. 

    GaN devices are more efficient and higher performance than current technologies, however there are manufacturing yield and scalability challenges. These need to be addressed to deliver reliable devices at a competitive cost. One of the key challenges is a consistently high-quality gate passivation, Atomfab delivers this solution with high throughput and low Cost of Ownership (CoO).  

    Performance: Excellent passivation and dielectric properties enable the demanding device performance critical for key applications.
    Plasma: Remote plasma delivers a reproducible GaN interface. Atomfab precisely controls the plasma to protect the underlying sensitive GaN substrate.
    Pace: High throughput delivered by a high deposition rate process on a high uptime HVM platform specifically developed for GaN power applications.
    The significantly reduced cost per wafer that Atomfab delivers is enabled by numerous technical innovations including a patent pending revolutionary fast remote plasma source.  
    Atomfab fulfils the customer needs on a single wafer platform with SEMI standard cluster configurations 
    and improved process controls for the latest compound semiconductor solutions. 

    “Atomfab provides many key benefits to our GaN device manufacturing customers including significant CoO 
    reduction, increased yield and excellent film quality & device performance. For many years Oxford 
    Instruments Plasma Technology has been known as the go to supplier for compound semiconductor 
    plasma solutions. We’ve leveraged that knowledge onto a HVM platform to ensure optimum devices are 
    produced all day, every day”, says Klaas Wisniewski, Strategic Business Development Director, OIPT. 
    Mike Gansser-Potts, Managing Director, OIPT states: “We’ve been highly commended for our unique 
    plasma ALD solutions and have listened to our HVM customers to take these solutions to the next level. We 
    are happy to announce that Atomfab provides these HVM solutions to our customers”. 
     
    For more information on Atomfab please visit Plasma.oxinst.com/Atomfab 

    - Ends -

    Issued for and on behalf of Oxford Instruments Plasma Technology 
    For further information and electronic copies of the images please contact: 
    Claire Critchell, Marketing Communications Manager 
    Oxford Instruments Plasma Technology 
    Email: Claire.critchell@oxinst.com | Tel:  +44 (0)1934 837053 
    About Oxford Instruments plc 
    Oxford Instruments designs, supplies and supports high-technology tools and systems with a focus on research and industrial applications. Innovation has been the driving force behind Oxford Instruments' growth and success for over 50 years, and its strategy is to effect the successful commercialisation of these ideas by bringing them to market in a timely and customer-focused fashion. The first technology business to be spun out from Oxford University, Oxford Instruments is now a global company and is listed on the London Stock Exchange (OXIG).  Its objective is to be the leading provider of new generation tools and systems for the research and industrial sectors with a focus on nanotechnology. Its key market sectors include nano-fabrication and nano-materials. The company’s strategy is to expand the business into the life sciences arena, where nanotechnology and biotechnology intersect 
    This involves the combination of core technologies in areas such as low temperature, high magnetic field and ultra high vacuum environments; Nuclear Magnetic Resonance; X-ray, electron, laser and optical based metrology; atomic force microscopy; optical imaging; advanced growth, deposition and etching.  
    Oxford Instruments aims to pursue responsible development and deeper understanding of our world through science and technology. Its products, expertise, and ideas address global issues such as energy, environment, security and health.  

    About Oxford Instruments Plasma Technology 

    Oxford Instruments Plasma Technology offers flexible, configurable process tools and leading-edge processes for the precise, controllable and repeatable engineering of micro- and nano-structures. Our systems provide process solutions for the etching of nanometre sized features, nanolayer deposition and the controlled growth of nanostructures.  
  • Oxford Instruments Plasma Technology (OIPT), a leading supplier to today's optoelectronics manufacturers announced that Sino-semic have selected OIPT's Cobra plasma etch systems for their manufacturing facilities in Taizhou City. Sino-semic, the first all Chinese developer and manufacturer of VCSELs for face recognition, noted the process capability and local support were key factors in their decision to adopt the high-performance inductively couple plasma (ICP) etch Cobra systems.

    Li Jun, Vice General Manager at Sino-semic comments: “We chose Oxford Instruments to supply our ICP etch equipment because they offer cutting edge plasma processing systems and unrivalled process support, which will be invaluable to us during our production scheme”. 
     
    The Cobra process solutions are designed to support leading edge device applications such as Lasers, RF, Power and advanced LEDs.  “VCSEL based devices are entering another exciting phase of growth”, stated Richard Pollard, Managing Director at OIPT, “We are thrilled to be providing our VCSEL processing solutions to a pioneering production manufacturer such as Sino-semic”. 

    - Ends -

    Issued for and on behalf of Oxford Instruments Plasma Technology 

    For further information and electronic copies of the images please contact: 
    Claire Kiermasz,  
    Marketing Communications Manager 
    Oxford Instruments Plasma Technology 
    Email: Claire.kiermasz@oxinst.com | Tel:  +44 (0)1934 837053  

    About Oxford Instruments plc 

    Oxford Instruments designs, supplies and supports high-technology tools and systems with a focus on research and industrial applications. Innovation has been the driving force behind Oxford Instruments' growth and success for over 50 years, and its strategy is to effect the successful commercialisation of these ideas by bringing them to market in a timely and customer-focused fashion. The first technology business to be spun out from Oxford University, Oxford Instruments is now a global company and is listed on the London Stock Exchange (OXIG).  Its objective is to be the leading provider of new generation tools and systems for the research and industrial sectors with a focus on nanotechnology. Its key market sectors include nano-fabrication and nano-materials. The company’s strategy is to expand the business into the life sciences arena, where nanotechnology and biotechnology intersect.

    This involves the combination of core technologies in areas such as low temperature, high magnetic field and ultra high vacuum environments; Nuclear Magnetic Resonance; X-ray, electron, laser and optical based metrology; atomic force microscopy; optical imaging; advanced growth, deposition and etching.  
    Oxford Instruments aims to pursue responsible development and deeper understanding of our world through science and technology. Its products, expertise, and ideas address global issues such as energy, environment, security and health.   

    About Oxford Instruments Plasma Technology 

    Oxford Instruments Plasma Technology offers flexible, configurable process tools and leading-edge processes for the precise, controllable and repeatable engineering of micro- and nano-structures. Our systems provide process solutions for the etching of nanometre sized features, nanolayer deposition and the controlled growth of nanostructures.  

    These solutions are based on core technologies in plasma-enhanced deposition and etch, ion-beam deposition and etch, atomic layer deposition, deep silicon etch and physical vapour deposition. Products range from compact stand-alone systems for R&D, through batch tools and up to clustered cassette-to-cassette platforms for high-throughput production processing. 

  • Oxford Instruments Plasma Technology (OIPT), a leading supplier to state-of-the-art optoelectronics manufacturers announced that AdTech Photonics Inc have selected OIPT’s Cobra® plasma etch systems for their manufacturing facilities in City of Industry California. AdTech Photonics manufactures Quantum Cascade (QC), Interband Cascade (IC) and other type of Infrared lasers covering the Near, Mid and Long-wave infrared spectral regions. The overall process solutions for QCL, ICL, VCSEL as well as other lasers and the local support offered by Oxford Instruments were key factors in their decision to adopt the high-performance inductively coupled plasma (ICP) etch Cobra® systems.

    “We chose Oxford Instruments to supply our ICP etch equipment because of their cutting-edge technology as well as their unparalleled process support, which will be invaluable to our manufacturing processes”, Said Xiaojun Wang, Director of Laser Development in AdTech.

    The Cobra process solutions are designed to support leading edge device applications such as lasers, RF, Power and advanced LEDs.

    “IR based laser products are entering another exciting phase of growth in the defence, security, and environmental markets”, stated Emiel Thijssen, Sales Director for America. “We are proud to be providing our laser processing solutions to a pioneering production manufacturer such as AdTech Photonics”.

    -Ends-

    Issued for and on behalf of Oxford Instruments Plasma Technology

    For further information and electronic copies of the images please contact:
    Claire Kiermasz, Marketing Communications Manager
    Oxford Instruments Plasma Technology
    Email: Claire.kiermasz@oxinst.com | Tel: +44 (0)1934 837053

    About Oxford Instruments plc

    Oxford Instruments designs, supplies and supports high-technology tools and systems with a focus on research and industrial applications. Innovation has been the driving force behind Oxford Instruments' growth and success for over 50 years, and its strategy is to effect the successful commercialisation of these ideas by bringing them to market in a timely and customer-focused fashion. The first technology business to be spun out from Oxford University, Oxford Instruments is now a global company and is listed on the London Stock Exchange (OXIG). Its objective is to be the leading provider of new generation tools and systems for the research and industrial sectors with a focus on nanotechnology. Its key market sectors include nano-fabrication and nano-materials. The company’s strategy is to expand the business into the life sciences arena, where nanotechnology and biotechnology intersect

    This involves the combination of core technologies in areas such as low temperature, high magnetic field and ultra high vacuum environments; Nuclear Magnetic Resonance; X-ray, electron, laser and optical based metrology; atomic force microscopy; optical imaging; advanced growth, deposition and etching.
    Oxford Instruments aims to pursue responsible development and deeper understanding of our world through science and technology. Its products, expertise, and ideas address global issues such as energy, environment, security and health.

    About Oxford Instruments Plasma Technology

    Oxford Instruments Plasma Technology offers flexible, configurable process tools and leading-edge processes for the precise, controllable and repeatable engineering of micro- and nano-structures. Our systems provide process solutions for the etching of nanometre sized features, nanolayer deposition and the controlled growth of nanostructures.

    These solutions are based on core technologies in plasma-enhanced deposition and etch, ion-beam deposition and etch, atomic layer deposition, deep silicon etch and physical vapour deposition. Products range from compact stand-alone systems for R&D, through batch tools and up to clustered cassette-to-cassette platforms for high-throughput production processing.


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