Picarro Inc

3105 Patrick Henry Dr.
Santa Clara,  CA  95054

United States
http://www.picarro.com
  • Booth: 443

Picarro provides industry leading solutions for real-time AMC monitoring. Based on our cavity ring-down spectroscopy (CRDS) technology, we offer significant advantages compared with incumbent AMC measurement techniques, such as ion-mobility spectrometry (IMS) and ion chromatography. Picarro SI2000 Series analyzers enable fast response to contaminants in the cleanroom in seconds, not hours. With real-time continuous parts-per-trillion (ppt) level analysis in seconds, Picarro analyzers provide early warning of contamination events for AMC monitoring in cleanrooms, FOUP, and FAB equipment.

For more information on our SI2000 Series analyzers, please visit www.semi.picarro.com.


 Products

  • Picarro SI2000 Series Analyzers
    • Real-time AMC monitoring in cleanrooms, FOUP and FAB Equipment • Fast, continuous analysis in seconds • Virtually no downtime or consumables cost • Factory conformance data packs with every analyzer • Extreme accuracy for event confirmation...

  • The Picarro SI2000 Series analyzers offer the power of highly sensitive laser spectroscopy for AMC cleanroom monitoring in a reliable, easy-to-use, compact design. These laser analyzers offer significant advantages compared with incumbent AMC measurement techniques, such as ion-mobility spectrometry (IMS) and ion chromatography. Both legacy techniques suffer the inadequacies of high costs of ownership, performance shortfalls and slow speeds of response.
    In a standard rack mounted enclosure paired with a multi-port sequencer and datalogging PLC, these analyzers are currently installed in several major semiconductor users’ fab locations. These analyzers are monitoring cleanroom air at the lowest possible concentration level in real-time with adherence to the process industry standard: IEC 61207 for performance and several SEMI standards for verified MDL and the calculations of reliability and safety. Optimized for long-term stability, the Picarro laser analyzers do not require field calibration and are ideal for continuous operation.
    The SI2000 series analyzers can be commissioned and operating within minutes.  The analyzers can operate for months without user interaction, and concentration trending data is continuously archived  to the analyzer’s internal hard drive.  The analyzer can be configured to automatically export measurement data via Ethernet, RS-232 interface, Analog 4-20mA or Modbus outputs.  Users can connect remotely with the analyzer’s Linux OS through a standard Remote Desktop connection or with similar remote login software. Picarro’s Industrial Service Engineers provide factory training & FAT support, repair services and analyzer startup & commissioning services.  
  • Picarro AMC Process Monitoring System
    • AMC system designed exclusively to support Picarro analyzer operation • Simultaneous, continuous flush sequencer module provides very fast sample point scanning cycles • Configurable for 8, 16, 24 or 32 sample ports ...

  • The Picarro AMC Process Monitoring System dramatically enhances the value of Picarro gas analyzers by expanding the area of coverage of our analyzers. The System has been designed to optimize response time in the presence of reactive gases with the lowest memory retention in the valves, connectors, sample lines and sequencer components. The Sample Sequencer Module utilizes a mass flow controller and a fast flow, high volume vacuum pump to draw sample as far away as 200 meters. The robust sequencer design is ideal for fast switching between different stocker locations, and for covering large areas in the fab or sub-fab and plenum areas. These highly reliable components assure the best performing system for AMC Process Monitoring with our Picarro SI2000 Series analyzers.

  • Picarro AMC Portable Leak Detection System
    • Simultaneous, continuous flush sequencer module provides very fast sample point scanning cycles • Fully user-programmable leak search mode • Configurable for 8 or 16 sample ports...

  • The Picarro AMC Portable Leak Detection System utilizes one or two 8-port sequencer modules to mobilize Picarro gas analyzers for fast detection and confirmation of contamination events. The Portable System has been designed to optimize response time in the presence of reactive gases with the lowest memory retention in the valves, connectors, sample lines and sequencer components. The Sample Sequencer Module utilizes a mass flow controller and a fast flow, high volume vacuum pump to quickly draw samples up to 50 meters away. Our robust and reliable components assure the best performing AMC Leak Detection System with our Picarro SI2000 Series analyzers.


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Semiconductor

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