Process Technology introduces NEW chemical heater.
Introducing ChemHeat In-Line Chemical Heater. Exceptional performance in a small package! Best-in-class for heating wet-process chemistries. Designed to support advancements in ultra-pure cleanliness requirements. This compact heater utilizes fluoropolymer wetted materials, an o-ringless sealing design, and the capability to detect any breach in the fluid path. Suitable for all non-flammable chemistries in either single pass or recirculating flow applications.
AVAILABLE NOW!
FEATURES
Advanced Cleanliness
- Chemistry contained within PFA tubing to eliminate environmental exposure
- No wetted o-ring seals eliminates source for contamination Internal ground plane not in the fluid path
Patented Purged Housing
- Early notification of a breach in the fluid path prevents process contamination
- Extends the life of the heater by continually removing chemical permeation
Compact & Modular
- Reduces tool design space requirements
- Facilitates retrofitting of existing tools
- Simplifies manufacturing complexity
Low Internal Volume
- Reduced cost of chemistry
- Allows for faster heat-up time in recirculating applications
Additional Process Benefits
- Low watt density for lower surface temperatures
- Precise and stable temperature control
APPLICATIONS
• Semiconductor Wet Processes
• Filtration
• Sterilization/Cleaning
FOR MORE INFORMATION
visit us at Semicon in Booth 1045
call 1-440-974-1300
visit processtechnology.com
or contact your local representative for more information
