The Picarro SI2000 Series analyzers offer the power of highly sensitive laser spectroscopy for AMC cleanroom monitoring in a reliable, easy-to-use, compact design. These laser analyzers offer significant advantages compared with incumbent AMC measurement techniques, such as ion-mobility spectrometry (IMS) and ion chromatography. Both legacy techniques suffer the inadequacies of high costs of ownership, performance shortfalls and slow speeds of response.
In a standard rack mounted enclosure paired with a multi-port sequencer and datalogging PLC, these analyzers are currently installed in several major semiconductor users’ fab locations. These analyzers are monitoring cleanroom air at the lowest possible concentration level in real-time with adherence to the process industry standard: IEC 61207 for performance and several SEMI standards for verified MDL and the calculations of reliability and safety. Optimized for long-term stability, the Picarro laser analyzers do not require field calibration and are ideal for continuous operation.
The SI2000 series analyzers can be commissioned and operating within minutes. The analyzers can operate for months without user interaction, and concentration trending data is continuously archived to the analyzer’s internal hard drive. The analyzer can be configured to automatically export measurement data via Ethernet, RS-232 interface, Analog 4-20mA or Modbus outputs. Users can connect remotely with the analyzer’s Linux OS through a standard Remote Desktop connection or with similar remote login software. Picarro’s Industrial Service Engineers provide factory training & FAT support, repair services and analyzer startup & commissioning services.