The COMPACT Sorter G5+ is the latest generation of 300mm COMPACT wafer sorters from RECIF Technologies. Its innovative design offers a seamless integration thanks to its field proven modules and technologies such as real time filed bus, direct drive transmission and many other technical advances.
The G5+ also provides the highest throughput ever achieved with a single robot, the smallest footprint and unsurpassed cleanliness demonstrated, as well as extremely secure wafer handling.
The RECIF Technologies COMPACT wafer sorter G5+ 300mm is providing IC manufacturers the ultimate productivity solution for 7nm nodes and beyond.
Main features :
- Edge contact end effector or Vacuum free backside contact
- N2 purge capability on load ports
- On the fly wafer alignment
- Industrial controller
- Real time field bus and electronics
- Several options like single wafer flipper or single wafer buffer
- 2LP & 4LP in line can be integrated into stocker
- Easy recipe creator software
Further information available upon request