July 12-14, 2016
San Fransisco, CA
SURAGUS is German metrology company developing and manufacturing non-contact testing systems for wafers & their coatings and provide sensors for in-tool monitoring and detailed offline imaging solutions for fabs and laboratories on 6 continents. SURAGUS‘ specialty is the contact-free sheet resistance measurement of Si and SiC, as well as the determination of metallization layer thickness. The applied eddy current technology behind SURAGUS measurements gives measurement capabilities that are vastly superior to traditional sheet resistance measurement methods such as 4PP testing. The SURAGUS Eddy Current approach allows for rapid testing and eliminates the need to make contact with films. In addition, it erases the possibility of inhomogeneous contact qualities influencing measurement, leading to a much higher repeatability. These attributes of the nationally & internationally award-winning technology combine to give fast and accurate analysis of crucial quality characteristics in processes such as deposition, implantation, annealing and polishing.