TDK Corporation of America

475 Half Day Road
Lincolnshire,  IL  60069

United States
  • Booth: 1926

Welcome to TDK featuring Purge Equipment Front End Module!

TDK is the leading manufacturer of factory automoation equipment

Visit the TDK booth to view a live demonstration of our products on display:

This year TDK is featuring it N2 Purge Equipment Front-End Module (EFEM).

* Mini Environment Control at Critical Process for Next Generation Transistor Manufacturing * Reliable Cost Effective Nitrogen Environment of 50 ppm Oxygen Level Combined with Sealed Design Purge Loadport * Achieves Very Low Wafer Contamination levels for AMC, O2, and RH * Better Process Uniformity and Higher Yields * Best in Class Wafer to Wafer Variation Control


* TAS300 J1 Loadport

* CE Mark Semi Compliant * Over 65,000 Installed at All Major FABS * FAB Proven Interoperability with MCBF Over 750,000 * 30% Improvement in Cycle Time * 50% Reduction is Shipping Package Volume *

* TAS 300mm Nitrogen Purge Loadport

* For Next Generation FABS * 10 Years of Experience with N2 Purge Systems *FAB Proven Interoperability with MCBF Over 750,000 *FAB Proven Design  for N2 Bottom Purge FOUPs *

Loadports offer options such as: N2 Purge Field Retrofit, Wafer Mapping, Integrated CID, Integrated E84, Ethernet Communication


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