July 12-14, 2016
San Fransisco, CA
TMC designs and manufactures active and passive building floor vibration control systems for semiconductor tools and Fabs. Our solutions enable higher resolution, increased yield and more precise measurements. STACIS® III is the most advanced active piezoelectric cancellation vibration system available. Quiet Island® sub-floor platforms, combined with STACIS piezoelectric isolators, provide vibration isolation for sensitive lithography and metrology equipment in a raised-floor environment. Everstill™ K-400, TMC’s new active benchtop vibration cancellation platform, features superior low-frequency performance in the critical 1-10 Hz range where small precision instruments are most sensitive.