Wacom Corporation

146 Red Schoolhouse Rd
Spring Valley,  NY  10977-7050

United States
  • Booth: 1930

Thank you for your interest in WACOM products.

Manufacturer, Importer / Exporter of Semiconductor Products. High-pressure mercury vapor lamps for ASML, Canon, Nikon and Ultratech semiconductor equipment. WACOM QUARTZ manufactures a broad range of high-purity fused quartz for the semiconductor industry.  Importers of Atmospheric and Differential Pressure Switches, Gauges, Flow Meters and LINTEC Mass Flow Controllers.  Distributor of CANON OPTRON Vacuum / Optical Coating Mateirals.  Wacom Silcone Rubber, Nisshinbo Glassy Carbon Plates, ITM Ceramic Fiber, Wacom Solar Simulators and DAEWON Chemcial Polishing Pads for Glass, Wafer and CMP.   Equipment Manufacturer of AMAYA MOCVD system with patented Vaporizer for ferroelectrics thin film deposition for mass production FeRAM and for the next generation FeRAM.  AMAYA APCVD equipment offer excellent performance and uniform film formations.  Available models combine high through-put and reduced TCO for greater profitability.  Tools - A200 (TEOS-O3/SiH4-O2 CVD System) and A6300 (Atmospheric Pressure SiH4/O2 CVD)and AMAX Series (SiH4-O2 CVD System).


  • Wacom Electric High Pressure UV Lamps
    WACOM High Pressure Mercury Vapor UV Lamps...

  • WACOM High Pressure Mercury Vapor Lamps are high precision UV light sources for the electronic device and large-sized display panel field.  WACOM high pressure UV lamps are used as UV light source for exposure systems to make semiconductor  devices, display panels and printed circuit boards.  Being a focal light source of high luminance, WACOM lamps radiate emission line spectrums of 365nm, 405nm and 436nm which are necessary for exposure.  
  • Wacom Quartz
    Wacom Quartz manufactures high purity quartz products for the Semiconductor Industry...

  • Wacom Quartz services the Semiconductor Industry with products that include process tubes, chambers, wafer carriers, crucibles and we offer custom fabrication projects.
  • Amaya APCVD Equipment
    AMAYA CO., LTD. is known for their APCVD systems used in semiconductor facilities throughout the world. ...

  • APCVD system for PV cell production.  The tool has achieved a high throughput of 2,000 wafers / hour (125mm) and 1,000 wafers / hour (156mm) and is available to produce the following film depositions.

    BSG film deposition by diborane (B2H6) doping with mono-silane (SiH4) and O2 to make P-type layer on N-type wafer to make PN junction for PV cell.
    PSG film deposition by Phosphine (PH3) doping with mono-silane (SiH4) and O2 to make N-type layer on P-type wafer to make PN junction for PV cell.
    SiO2 film deposition by mono-silane (SiH4) and O2 for non-diffusion part of wafer for hard mask purpose.
    SiO2 film deposition by mono-silane (SiH4) and O2 on wafer backside to enhance back side reflection.

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MEMS, Photovoltaic, Power Semiconductors

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