July 12-14, 2016
San Fransisco, CA
Owners & Manufacturers of the ECOSYS Gas Abatement systems.
Ecosys Abatement LLC are a division of HT Advance Technology Pte (Singapore) Ltd
HT Advance Technology are the owners and manufacturers of the ECOSYS range of specialty gas abatement equipment.
Our product range includes the industry standard Marathon unit as well as the complimentary CDO, Vector and Guardian units. The Marathon unit offers >99% destruction efficiency on all PFC and Greenhouse gas species.
Ecosys are currently working on the launch of a new 'Non-fuel' PFC abatement unit, which combines a low power Plasma with the clean reactor technology and combination water scrubber of the CDO platform. Please drop in and discuss this new product, and our new vacuum pump product with our technical staff at the booth.
Ecosys Abatement also offer support for your existing Ecosys abatement tools with full spare parts availability and technical/service support by our local Ecosys engineers.
We look forward to welcoming you at ECOSYS, the one-stop shop for all your Abatement needs.
SEMI Global Headquarters
673 South Milpitas Blvd.
Milpitas, CA 95035
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