July 12-14, 2016
San Fransisco, CA
Zygo Corporation over 45 years of metrology and optics.
ZYGO, a world leader in yield improvement and process control systems, provides a wide range of mask inspection, surface analysis, and precision displacement measurement, as well as precision optical components and optical assemblies. Metrology systems offering critical dimension measurement on OPC masks, chrome masks, phase shift masks, and flat panel displays. Systems for automated reticle inspection, 3D surface topography, and surface shape (flatness) are available.