Heateflex Corporation

405 E. Santa Clara St.
Arcadia,  CA  91006-7227

United States
  • Booth: 566

Welcome to Heateflex Corporation!

Since 1974, Heateflex Corporation has led the way in providing ultra-pure heating equipment to the semiconductor, life science, food and beverage, and other industries requiring precision heating.  The company offers a broad range of customizable, high-purity equipment for heating and cooling fluids, including chemical heaters, deionized water heaters, gas heaters, steam heaters and heat exchangers.  Heateflex strives to continuously innovate high quality, reliable, and efficient designs to meet the stringent demands of their customers.  More information about the company and its products may be found at www.heateflex.com.


  • Aries Solvent Heater
    Heateflex's Aries Solvent Heater is designed to safely and effectively heat most solvents and non-flammable gases....

  • Heateflex's Aries Solvent Heater is designed to safely and effectively heat most solvents and non-flammable gases. Tested to UL499 and UL823 standards, the heater is engineered for both single pass and recirculation heating applications where process temperature, fluid cleanliness, and safety are critical concerns. An added benefit of this solvent heater is the cooling tube, which allows for temperature reduction of the heater core and process. This reduces the amount of time spent waiting for the heater core to cool down.
  • Aquarius Deionized (DI) Water Heater System
    The Aquarius® deionized (DI) water heater is the perfect solution for high purity heating applications requiring accurate temperature control....

  • The Aquarius Power-to-Flow Control™ system provides one of the most accurate temperature control modules available in a DI water heater. Due to the Power-to-Flow Control innovation, Aquarius eliminates undesirable overshoots or drops in fluid temperature.

    The Aquarius’ Power-to-Flow Control innovation is part of the system’s Programmable Logic Controller (PLC).  Because of it’s multi-loop capability and feed-forward functions, Power-to-Flow Control compensates for variations in the process flow rate. Most importantly, this feature measures the flow rate of the fluid as it comes into the heater, evaluates the temperature at various stages in the heating process, and then adjusts the amount of power applied to each heating zone based on these measurements. And, this advanced integrated control method reacts quickly to any variations in flow. The result is a steady stream of DI water at a stable temperature.

  • Quartz In-Line Heater
    The Quartz High Purity In-Line Fluid Heater meets the stringent heating standards required for semiconductor manufacturing....

  • This heater uses GE Quartz 214 wetted surfaces to ensure high purity and chemical compatibility with most process fluids. The heating elements mount directly on the quartz surface, providing an effective heat transfer via conduction. With no lamps to replace and no cooling air required, the cost of ownership for this heater is low.

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MEMS, Power Semiconductors, Semiconductor

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