25 Rue Didier Daurat
Parc Mermoz
Castelnau-le-Lez,  34170

  • Booth: 2031

Stop by to discuss your E-Chuck & RTP/RTA requirements

Global Clamping Solutions for Advanced Semiconductor Processing

Semco Engineering, Inc., a subsidiary of Semco Technologies, specializes in Electrostatic Chucks and gas delivery systems. Semco's Electrostatic Chucks are plug and play and are available in multi polarities, are reworkable, and have an excellent thermal transfer under vacuum. Semco's patented ESC technology provides long lifetime and high reliability.  Additionally, our ESC's work in a temperature range from -150°C upto 650°C, and can include embedded heaters up to 550°C. Semco also designs and manufacturers valves, mass flow controllers (MFC's), and gas panels

Rapid Thermal Processing & Annealing Equipment

As a subsidiary within the ECM Group, we also provide high-quality RTP/RTA systems, covering all applications (under the brand name JIPELEC), ranging from entry-level systems in a multi-user laboratory to standalone systems dedicated to research-production applications.

- Rapid Thermal Processing (RTP)
- Rapid Thermal Annealing (RTA)
- Rapid Thermal Oxidation (RTO)
- Rapid Thermal Nitridation (RTN)
- Rapid Thermal Diffusion (RTD)

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MEMS, Photovoltaic, Semiconductor, Sensors

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