The Twist is, it is an unconventional EFEM. It is not a "bolt on" module like a conventional EFEM, but is integrated into, like a slave device, that is controlled by the host or "parent tool." iFEM is THE off-the-shelf EFEM that has evolved to meet the industry equipment standardization to guarantee common interface design.
Where off-the-shelf EFEMs do not meet small and mid equipment markets, due to EFEM manufacturers unwilling to customize standard product in low volume or specialty applications, iFEM is highly customizable. With a trackless robot and universal end-effectors it can serve up to four(4), 300mm load ports. Users with custom requirements can now rely on our iFEM as the most economical solution to unload product and deliver it to the parent tool for processing.
Visit us at Booth 1827 to learn more about our iFEM and other handling solutions.