Inspectrology LLC

142 North Road Suite N
Sudbury,  MA  01776

United States
  • Booth: 147

The Best Value in Metrology

Reliability and Flexibility are the hallmark of the IVS 200. Overlay Registration, CD, IR Infra Red, Z Height (film thickness), Contact, Bump, Vernier, In Circuit Overlay are all possible.

With world wide support and representatives in every major market, Inspectrology is well positioned to provide the support needed to keep fabs running at peak efficiency

We Specialize in supporting smaller factories where system up-time is critical. We understand the needs to keep up time at 100% and mean time between failures to months and years.

Inspectrology is your complete, reliable solution provider for quality Metrology sales and services.

With decades of Metrology experience, the semiconductor professionals at Inspectrology provides full service supportmetrology products, metrology standards, and educational training services to fabs worldwide.

Inspectrology provides Metrology System sales and services to fabs in a wide range of market sectors including Microelectromechanical systems (MEMS), Semiconductor, Compound Semiconductor (GaAs, GaN, SiC, SOI etc), LED (Light Emitting Diode) and Solar.

 Press Releases


    News Release July 9, 2019 

    Inspectrology LLC Introduces IVS 220 Optical Metrology Solution for high productivity in 200mm Environments

    Inspectrology LLC brings new technology to 200mm metrology with the new IVS 220 which features 165 wafer per hour throughput and sub 1nm precision.

    Sudbury, MA — July 9, 2019 — Inspectrology LLC, a manufacturer of optical overlay and CD Metrology Systems, announced today the release of the new IVS 220 at Semicon West. Designed to meet today’s advanced metrology needs, a number of features have been added to the system to build on the solid reputation of the IVS series metrology systems.

    “The IVS 220 will allow us to reduce our metrology cost of ownership while at the same time meet our ever-tightening process requirements.” said David Andrews, Lithography Equipment Engineer at Analog Devices Wilmington Manufacturing. “Inspectrology’s IVS series optical metrology systems have been an integral part of our process for over 20 years and the addition of the IVS 220 will help us move to the next level.

    “The IVS 220 brings advanced technology to 75mm-200mm fabs who are pushing the boundaries of their processes.” added Neil Casa, Inspectrology LLC vice president of Engineering. “We have significantly improved throughput and tightened the precision. It was critical for us to maintain the MTBF that the IVS systems are legendary for while pushing performance limits.”

    About Inspectrology LLC
    Inspectrology LLC Inc., headquartered in Sudbury, MA, USA, has supplied optical metrology systems to the semiconductor, compound semiconductor, MEMS and LED industries with since 1979, formerly as IVS and Schlumberger. With offices in North America, Europe and Asia, and a large international installed base, Inspectrology LLC has the global reach and expertise to support installations worldwide.
    Contact: Paul C. Knutrud, Inspectrology LLC Inc., +1 978-318-4041,


  • IVS 220 Overlay Metrology Solution
    IVS-220 – 75-200 mm White Light Optical CD and Overlay Metrology for Semiconductor, LED and MEMS. ...

  • The IVS 220 has been designed for ultimate precision, TIS and throughput. The cornerstone of the IVS 220’s unbeatable reliability and stability is its mean-time between failure (MTBF) of 2100 hours. The IVS 200 series leads the industry, ensuring optimal system availability and years of problem-free operation. The robust design of the wafer handling and navigation system requires no operator assistance during recipe execution. Recipes and data remain stable over time.

    Versatile wafer handling accommodates many variations in wafer composition including silicon carbide, quartz, glass, GaAs, GaN, LiNO3, InP and slotted wafers of various sizes. Square substrates are also supported.

    The IVS 220 delivers unparalleled measurement performance on all layers with CD and overlay measurements in the same recipe. Specific algorithms for MEMS applications allow for measurement of a wide array of MEMS structures. The proven capabilities of the IVS 200 series to perform with high precision and rock solid reliability set this system apart.

    The IVS 220 is completely compatible with the IVS 200 and job plans from the IVS 1xx systems can also be upgraded to the IVS 200 platform.

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