Conax Technologies

2300 Walden Ave
Buffalo,  NY  14225-4740

United States
  • Booth: 1631

Conax Temperature Sensors & Vacuum/Pressure Feedthroughs

Conax Technologies is a 65-year-old privately held company which designs and manufactures Thermocouples, RTDs, Vacuum and Pressure Compression Seal Fittings & Feedthroughs in Buffalo, NY, USA.

In the semiconductor industry Conax specializes in platinum-rhodium TCs for epitaxial tools.  These TCs may be used for either process control or calibration of IR systems.  We offer unique options that allow increased safety by extending sensor life such as our patent-pending long-life quartz coating, EtchDefender™.  Reducing the number of maintenance cycles needed to maintain equipment lowers the cost of ownership of tools, making fabs more profitable.

Conax also offers Spike and Profile TCs for horizontal and vertical furnaces.  These sensors can be made to OEM standards or customized to unique needs.  Also we offer wire harness feedthroughs for passing TC signals through vacuum or pressure boundaries; copper wire feedthroughs for HAST testing and electrode feedthroughs for powering heating elements under vacuum.

Conax provides sensors & feedthrough for the photovoltaic industry used in crystal growth, thin film deposition and power and TC vacuum feedthroughs.

 Press Releases

  • Our patent-pending EtchDefender™ coating extends the life of quartz thermocouple sheaths in ASM® EPSILON® epitaxial reactors up to 3X longer and reduces your annual spend by over 30%.

    This leading-edge technology was tested extensively both in a laboratory setting and in a production environment at a major wafer manufacturing facility. Using TCs coated with EtchDefender™ allows a tool to run continuously and reduces maintenance cycles, consistently resulting in:

    • Increased process uptime
    • Reduced process variation, so more wafers can be produced per tool with higher
    • Reduced labor and increased safety
    • Decreased risk of technicians igniting pyrophoric deposits as a result of reduced
      maintenance requirements
    • Decreased exposure of the chamber to oxygen, resulting in less time needed to purge the oxygen from all surfaces in SiGe applications

    Click here to find out more about EtchDefender™ Technology.

    ASM® and EPSILON® are registered trademarks of ASM® International. Neither Conax Technologies nor its products are affiliated with, approved by or sponsored by ASM® International.

  • Conax also offers standard or custom designed Profile and Spike Thermocouples for vertical and horizontal furnaces. Our high-precision temperature sensors are engineered to address the critical process of temperature measurement and control required for the semiconductor, photovoltaic and LED industries.

    Standard and custom designed Pressure/Vacuum Feedthroughs

    Conax Technologies designs and manufactures Pressure/Vacuum Feedthroughs for any application or equipment, including:

    • Highly Accelerated Stress Testing (HAST) feedthroughs for reliability testing
    • Redundant thermocouple sensor probes with dual-seal capability to prevent a vacuum leak into the ingot furnacing chamber for polycrystalline wafer production
    • Customized sensor/flange assemblies to facilitate quick replacement of sensors during maintenance cycles
    • Process control thermocouples utilized inside the deposition chamber for thin-film solar panel production
    • Thermocouple wire feedthroughs to pass temperature sensor reading from within the vacuum chamber to external instrumentation
    • Electrode feedthroughs to bring power into the vacuum chamber to power heating elements
  • Conax specializes in high quality wire sealing in demanding applications such as Highly Accelerated Stress Testing (HAST) typical in the semiconductor industry. Cyclical temperature testing is hard on seals, wire insulation and on the wire itself from a corrosion standpoint.

    Each Conax feedthrough is pressure certified upon initial design to insure a leak proof seal. The feedthroughs may be supplied with straight threads (bulk head fitting style as shown below) or with NPT threads or flanged connection.

 Additional Info

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LED/solid state lighting, MEMS, Photovoltaic, Power Semiconductors, Semiconductor, Sensors

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