Measurements to ensure the quality of pure gases in semiconductor manufacture
Process Sensing Technologies show cases range at Semicon West
To ensure product quality and prevent loss of yield, semiconductor component fabrication processes must be monitored for moisture ingress, as well as O2 and other gases down to parts per trillion. Five well-known Process Sensing Technologies (PST) companies, Analytical Industries Inc, Michell Instruments, LDetek, Rotronic and Ntron offer a broad range of moisture, oxygen and speciality gas analyzers that ensure the quality of ultra-high purity gases used in semiconductor manufacture. PST brings together years of experience in serving this highly specialised and demanding application, making it easier for you to find the exact product, or mix of products to meet your needs at the critical measurement points throughout your process.
The MultiDetek2 compact gas chromatograph from LDetek is a standalone gas analyzer which uses Plasma Emission Detector technology to detect various sub-ppb trace impurities in UHP gases.
Michell Instruments’ S8000 RS precision hygrometer provides drift-free measurements of trace moisture down to -90 °C dew point with no need for additional cooling.
For cost-effective measurements of trace oxygen down to parts per trillion, the PI2-UHP oxygen analyzer for ultra-high purity gases uses Analytical Industries’ innovative Pico-Ion electrochemical oxygen sensor.
Ntron Gas Measurement offers the SIL-O2 Safety Integrity Level Oxygen Analyzer for critical safety applications. It complies with IEC61508/ IEC61511.
The Rotronic Monitoring System is a modular system of hardware elements and web-based software. It provides maximum flexibility in installation and ensures readily available data. The data loggers record measurements from Rotronic and third-party sensors and transmit them to the secure database.
It enables clean room operators to monitor and manage key parameters for semiconductor fabrication such as humidity, temperature and particulates in a single platform. It stores information and makes it available to users, regardless of whether they access the database via a PC, Mac, tablet or smartphone.
Visit PST at Semicon West, San Francisco on booth #5480 from July 9-11.