July 12-14, 2016
San Fransisco, CA
Rigaku is a leading supplier of X-ray metrology tools employing fluorescence (XRF), diffraction (XRD), and reflectometry (XRR) techniques. X-ray metrology solutions are available for multiple sample sizes, dielectric and metallic materials, blanket and patterned wafers. Systems include: In-line, high-throughput X-ray monitoring tools for thickness, density and roughness measurements, XRF spectrometers for thickness and composition determination; and total-reflection XRF spectrometers (TXRF) with integrated vapor phase decomposition (VPD) for trace contamination monitoring. Our vacuum products division offers a full line of rotary magnetic fluid feedthroughs.